Effect of Coil Current on the Properties of Hydrogenated DLC Coatings Fabricated by Filtered Cathodic Vacuum Arc Technique

We successfully prepared hydrogenated DLC (a-C:H) with a thickness higher than 25 μm on stainless steel using a filtered cathode vacuum arc (FCVA) technique. The structural and mechanical properties of DLC were systematically analyzed using different methods such as x-ray photoelectron spectroscopy, Raman spectroscopy, scanning electron microscopy, Vickers hardness, nanohardness, and friction and wear tests. The effect of coil current on the arc voltage, ion current, and mechanical properties of resultant films was systematically investigated. The novelty of this study is the fabrication of DLC with Vickers hardness higher than 1500 HV, in the meanwhile with the thickness higher than 30 μm through varying the coil current with FCVA technique. The results indicated that the ion current, deposition rate, friction coefficient, and Vickers hardness of DLC were significantly affected by the magnetic field inside the filtered duct.