Effect of bias on composition and microstructure of Zr-Si-N diffusion barrier

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Original language	English
Pages (from-to)	441
Number of pages	1
Journal	Zhongguo Youse Jinshu Xuebao/Chinese Journal of Nonferrous Metals
Volume	14
Issue number	3
State	Published - Mar 2004

Cite this

@article{60bf10484d5f4868a0132002b899cb87,

title = "Effect of bias on composition and microstructure of Zr-Si-N diffusion barrier",

author = "Song, \{Zhong Xiao\} and Xu, \{Ke Wei\} and Hua Chen",

year = "2004",

month = mar,

language = "英语",

volume = "14",

pages = "441",

journal = "Zhongguo Youse Jinshu Xuebao/Chinese Journal of Nonferrous Metals",

issn = "1004-0609",

publisher = "Central South University ",

number = "3",

}

TY - JOUR

T1 - Effect of bias on composition and microstructure of Zr-Si-N diffusion barrier

AU - Song, Zhong Xiao

AU - Xu, Ke Wei

AU - Chen, Hua

PY - 2004/3

Y1 - 2004/3

UR - https://www.scopus.com/pages/publications/2942696218

M3 - 文章

AN - SCOPUS:2942696218

SN - 1004-0609

VL - 14

SP - 441

JO - Zhongguo Youse Jinshu Xuebao/Chinese Journal of Nonferrous Metals

JF - Zhongguo Youse Jinshu Xuebao/Chinese Journal of Nonferrous Metals

IS - 3

ER -