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Effect of a thin Cr layer on the microstructures and fracture behaviours of copper films

  • Henan University of Science and Technology
  • Xi'an Jiaotong University

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

An investigation on Cu/Cr/Si composite thin films demonstrated that a thin Cr layer affects the microstructures and mechanical behavior of Cu films significantly. The fracture modes changes from brittle fracture to ductile rupture, as indicated by the dimpled rupture of Cu films. Moreover, the Cr sticking layer can result in carrot-shaped rods and a fine grain size. Further analysis indicates their deformation and fracture processes are closely related to the coupling of dislocation-mediated plasticity as well as the formation and growth of voids which act as sites for nucleation of the dimples.

Original languageEnglish
Title of host publicationAdvanced Engineering Materials
Pages2376-2379
Number of pages4
DOIs
StatePublished - 2011
Event2nd International Conference on Manufacturing Science and Engineering, ICMSE 2011 - Guilin, China
Duration: 9 Apr 201111 Apr 2011

Publication series

NameAdvanced Materials Research
Volume194-196
ISSN (Print)1022-6680

Conference

Conference2nd International Conference on Manufacturing Science and Engineering, ICMSE 2011
Country/TerritoryChina
CityGuilin
Period9/04/1111/04/11

Keywords

  • Cu/Cr films
  • Dimple
  • Fracture
  • Microstructure
  • Sputtering

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