@inproceedings{5b234fc4eb784f7cbf59087a6c8476af,
title = "Diffraction grating microfabrication by ICP technique with two-layer lift-off processing in single crystal diamond",
abstract = "The rectangular diffraction grating on single crystal diamond was fabricated with the wavelength of 10.6μm. A novel method called bi-layer lift-off technology was used to form the hard mask. This approach simplified the patterning process of the thick Al film and made the deep etching on single crystal diamond achievable according to our requirement. The fabrication steps and the bi-layer liftoff technology are demonstrated in detail. We characterized the diamond grating and found that the angles of its sidewalls were almost vertical (within 3°), with a mean roughness of Ra = 3.01nm on the bottom and 12.4nm on the top.",
keywords = "Bi-layer lift-off, Diffraction grating, Inductive coupled plasma etching, Single crystal diamond",
author = "Yuhang Zhao and Zhiqiang Song and Yan Liang and Tianfei Zhu and Shenli Jia and Wang, \{Hong Xing\} and Shuwei Fan",
note = "Publisher Copyright: {\textcopyright} 2024 SPIE.; Components and Packaging for Laser Systems X 2024 ; Conference date: 29-01-2024 Through 30-01-2024",
year = "2024",
doi = "10.1117/12.3000453",
language = "英语",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Glebov, \{Alexei L.\} and Leisher, \{Paul O.\}",
booktitle = "Components and Packaging for Laser Systems X",
}