Diamond-like carbon based micro-pressure sensor with ultra-thin sensitive membrane

Xin Ma; Qi Zhang; Peng Guo; Yulong Zhao; Aiying Wang

doi:10.1109/SENSORS47087.2021.9639481

Diamond-like carbon based micro-pressure sensor with ultra-thin sensitive membrane

Xin Ma
, Qi Zhang
, Peng Guo
, Yulong Zhao
, Aiying Wang

School of Mechanical Engineering

Xi'an Jiaotong University
CAS - Ningbo Institute of Material Technology and Engineering
University of Chinese Academy of Sciences

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

in this study, diamond-like carbon (DLC) piezoresistive film and ultra-thin sensitive membrane structure (580 nm thick Si3N4/SiO2) were used for the micro-pressure sensors to improve the sensitivity. High power impulse magnetron sputtering (HiPIMS) process was used to deposit DLC film with high gauge factor (GF), and the wet-etching process was used to fabricate the ultra-thin sensitive structure. Based on Raman spectra, the size of sp2 clusters slightly increased after the release of the internal stress, which might reduce the GF of the DLC film. However, the DLC based sensor still showed high sensitivity of 3.2×10-4/kPa, good non-linearity of 2.4% FS and satisfied repeatability. This work showed an efficient and economical method to improve the performance of the micro-pressure sensors.

Original language	English
Title of host publication	2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728195018
DOIs	https://doi.org/10.1109/SENSORS47087.2021.9639481
State	Published - 2021
Event	20th IEEE Sensors, SENSORS 2021 - Virtual, Online, Australia Duration: 31 Oct 2021 → 4 Nov 2021

Publication series

Name	Proceedings of IEEE Sensors
Volume	2021-October
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	20th IEEE Sensors, SENSORS 2021
Country/Territory	Australia
City	Virtual, Online
Period	31/10/21 → 4/11/21

Keywords

diamond-like carbon
internal stress
micro-pressure sensor
piezoresistive
ultra-thin structure

Access to Document

10.1109/SENSORS47087.2021.9639481

Cite this

@inproceedings{4163f802b359419bb8ebe3b310c5e8c9,

title = "Diamond-like carbon based micro-pressure sensor with ultra-thin sensitive membrane",

abstract = "in this study, diamond-like carbon (DLC) piezoresistive film and ultra-thin sensitive membrane structure (580 nm thick Si3N4/SiO2) were used for the micro-pressure sensors to improve the sensitivity. High power impulse magnetron sputtering (HiPIMS) process was used to deposit DLC film with high gauge factor (GF), and the wet-etching process was used to fabricate the ultra-thin sensitive structure. Based on Raman spectra, the size of sp2 clusters slightly increased after the release of the internal stress, which might reduce the GF of the DLC film. However, the DLC based sensor still showed high sensitivity of 3.2{\texttimes}10-4/kPa, good non-linearity of 2.4\% FS and satisfied repeatability. This work showed an efficient and economical method to improve the performance of the micro-pressure sensors.",

keywords = "diamond-like carbon, internal stress, micro-pressure sensor, piezoresistive, ultra-thin structure",

author = "Xin Ma and Qi Zhang and Peng Guo and Yulong Zhao and Aiying Wang",

note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 20th IEEE Sensors, SENSORS 2021 ; Conference date: 31-10-2021 Through 04-11-2021",

year = "2021",

doi = "10.1109/SENSORS47087.2021.9639481",

language = "英语",

series = "Proceedings of IEEE Sensors",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings",

}

Ma, X, Zhang, Q, Guo, P, Zhao, Y & Wang, A 2021, Diamond-like carbon based micro-pressure sensor with ultra-thin sensitive membrane. in 2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings. Proceedings of IEEE Sensors, vol. 2021-October, Institute of Electrical and Electronics Engineers Inc., 20th IEEE Sensors, SENSORS 2021, Virtual, Online, Australia, 31/10/21. https://doi.org/10.1109/SENSORS47087.2021.9639481

Diamond-like carbon based micro-pressure sensor with ultra-thin sensitive membrane. / Ma, Xin; Zhang, Qi; Guo, Peng et al.
2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2021. (Proceedings of IEEE Sensors; Vol. 2021-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Diamond-like carbon based micro-pressure sensor with ultra-thin sensitive membrane

AU - Ma, Xin

AU - Zhang, Qi

AU - Guo, Peng

AU - Zhao, Yulong

AU - Wang, Aiying

PY - 2021

Y1 - 2021

N2 - in this study, diamond-like carbon (DLC) piezoresistive film and ultra-thin sensitive membrane structure (580 nm thick Si3N4/SiO2) were used for the micro-pressure sensors to improve the sensitivity. High power impulse magnetron sputtering (HiPIMS) process was used to deposit DLC film with high gauge factor (GF), and the wet-etching process was used to fabricate the ultra-thin sensitive structure. Based on Raman spectra, the size of sp2 clusters slightly increased after the release of the internal stress, which might reduce the GF of the DLC film. However, the DLC based sensor still showed high sensitivity of 3.2×10-4/kPa, good non-linearity of 2.4% FS and satisfied repeatability. This work showed an efficient and economical method to improve the performance of the micro-pressure sensors.

AB - in this study, diamond-like carbon (DLC) piezoresistive film and ultra-thin sensitive membrane structure (580 nm thick Si3N4/SiO2) were used for the micro-pressure sensors to improve the sensitivity. High power impulse magnetron sputtering (HiPIMS) process was used to deposit DLC film with high gauge factor (GF), and the wet-etching process was used to fabricate the ultra-thin sensitive structure. Based on Raman spectra, the size of sp2 clusters slightly increased after the release of the internal stress, which might reduce the GF of the DLC film. However, the DLC based sensor still showed high sensitivity of 3.2×10-4/kPa, good non-linearity of 2.4% FS and satisfied repeatability. This work showed an efficient and economical method to improve the performance of the micro-pressure sensors.

KW - diamond-like carbon

KW - internal stress

KW - micro-pressure sensor

KW - piezoresistive

KW - ultra-thin structure

UR - https://www.scopus.com/pages/publications/85123634979

U2 - 10.1109/SENSORS47087.2021.9639481

DO - 10.1109/SENSORS47087.2021.9639481

M3 - 会议稿件

AN - SCOPUS:85123634979

T3 - Proceedings of IEEE Sensors

BT - 2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 20th IEEE Sensors, SENSORS 2021

Y2 - 31 October 2021 through 4 November 2021

ER -

Diamond-like carbon based micro-pressure sensor with ultra-thin sensitive membrane

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