Development of microelectromechanical varactors

C. H. Lee; S. H. Tsai; C. H. Lin; R. Maeda; J. J. Tsaur; K. J. Fang; J. M. Lu; C. Lee; W. Fang

doi:10.1117/12.425389

Development of microelectromechanical varactors

C. H. Lee
, S. H. Tsai
, C. H. Lin
, R. Maeda
, J. J. Tsaur
, K. J. Fang
, J. M. Lu
, C. Lee
, W. Fang

School of Instrument Science and Technology

National Tsing Hua University

Research output: Contribution to journal › Article › peer-review

Abstract

A varactor with a wide tuning range is essential to adjust the desired frequency band among a wide Gigahertz range and compensate for process deviation as well as effects of temperature. Nowadays, conventional varactors with high quality cannot be available in standard silicon processes; furthermore, they cannot avoid high losses at high frequencies due to the nature of semiconductors. A novel micromachined varactor with a wide tuning range is presented. It can provide a digital selection of capacitance. The electroplating process was singled out to fabricate such a device, with its feature of high aspect ratio. The design has been verified through a finite-element analysis to show a tuning range of 350%.

Original language	English
Pages (from-to)	486-493
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4408
DOIs	https://doi.org/10.1117/12.425389
State	Published - 2001

Keywords

Electroplating
Nickel
RF
Varactor

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10.1117/12.425389

Cite this

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title = "Development of microelectromechanical varactors",

abstract = "A varactor with a wide tuning range is essential to adjust the desired frequency band among a wide Gigahertz range and compensate for process deviation as well as effects of temperature. Nowadays, conventional varactors with high quality cannot be available in standard silicon processes; furthermore, they cannot avoid high losses at high frequencies due to the nature of semiconductors. A novel micromachined varactor with a wide tuning range is presented. It can provide a digital selection of capacitance. The electroplating process was singled out to fabricate such a device, with its feature of high aspect ratio. The design has been verified through a finite-element analysis to show a tuning range of 350\%.",

keywords = "Electroplating, Nickel, RF, Varactor",

author = "Lee, \{C. H.\} and Tsai, \{S. H.\} and Lin, \{C. H.\} and R. Maeda and Tsaur, \{J. J.\} and Fang, \{K. J.\} and Lu, \{J. M.\} and C. Lee and W. Fang",

year = "2001",

doi = "10.1117/12.425389",

language = "英语",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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T1 - Development of microelectromechanical varactors

AU - Lee, C. H.

AU - Tsai, S. H.

AU - Lin, C. H.

AU - Maeda, R.

AU - Tsaur, J. J.

AU - Fang, K. J.

AU - Lu, J. M.

AU - Lee, C.

AU - Fang, W.

PY - 2001

Y1 - 2001

N2 - A varactor with a wide tuning range is essential to adjust the desired frequency band among a wide Gigahertz range and compensate for process deviation as well as effects of temperature. Nowadays, conventional varactors with high quality cannot be available in standard silicon processes; furthermore, they cannot avoid high losses at high frequencies due to the nature of semiconductors. A novel micromachined varactor with a wide tuning range is presented. It can provide a digital selection of capacitance. The electroplating process was singled out to fabricate such a device, with its feature of high aspect ratio. The design has been verified through a finite-element analysis to show a tuning range of 350%.

AB - A varactor with a wide tuning range is essential to adjust the desired frequency band among a wide Gigahertz range and compensate for process deviation as well as effects of temperature. Nowadays, conventional varactors with high quality cannot be available in standard silicon processes; furthermore, they cannot avoid high losses at high frequencies due to the nature of semiconductors. A novel micromachined varactor with a wide tuning range is presented. It can provide a digital selection of capacitance. The electroplating process was singled out to fabricate such a device, with its feature of high aspect ratio. The design has been verified through a finite-element analysis to show a tuning range of 350%.

KW - Electroplating

KW - Nickel

KW - RF

KW - Varactor

UR - https://www.scopus.com/pages/publications/0034871079

U2 - 10.1117/12.425389

DO - 10.1117/12.425389

M3 - 文章

AN - SCOPUS:0034871079

SN - 0277-786X

VL - 4408

SP - 486

EP - 493

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Development of microelectromechanical varactors

Abstract

Keywords

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