Development of bi-directional valve-less micropump for liquid

S. Matsumoto; A. Klein; R. Maeda

doi:10.1109/memsys.1999.746791

Development of bi-directional valve-less micropump for liquid

S. Matsumoto
, A. Klein
, R. Maeda

National Institute of Advanced Industrial Science and Technology

Research output: Contribution to conference › Paper › peer-review

43 Scopus citations

Abstract

A micropump based on a novel flow rectification principle was developed. Instead of mechanical check valves, the difference of flow resistance in narrow channels caused by the temperature dependence of liquid viscosity is utilized as the basis of the valve effect. This method allows a flexible control of the pump function, including bi-directional pumping. A prototype device actuated by a piezoelectric element was designed and fabricated to confirm the pump function. The fluidic and thermal conditions for the pump actuation, and the characteristics of its behavior revealed by experiments are discussed.

Original language	English
Pages	141-146
Number of pages	6
DOIs	https://doi.org/10.1109/memsys.1999.746791
State	Published - 1999
Externally published	Yes
Event	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS - Orlando, FL, USA Duration: 17 Jan 1999 → 21 Jan 1999

Conference

Conference	Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS
City	Orlando, FL, USA
Period	17/01/99 → 21/01/99

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10.1109/memsys.1999.746791

Cite this

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title = "Development of bi-directional valve-less micropump for liquid",

abstract = "A micropump based on a novel flow rectification principle was developed. Instead of mechanical check valves, the difference of flow resistance in narrow channels caused by the temperature dependence of liquid viscosity is utilized as the basis of the valve effect. This method allows a flexible control of the pump function, including bi-directional pumping. A prototype device actuated by a piezoelectric element was designed and fabricated to confirm the pump function. The fluidic and thermal conditions for the pump actuation, and the characteristics of its behavior revealed by experiments are discussed.",

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year = "1999",

doi = "10.1109/memsys.1999.746791",

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note = "Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS ; Conference date: 17-01-1999 Through 21-01-1999",

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AU - Klein, A.

AU - Maeda, R.

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AB - A micropump based on a novel flow rectification principle was developed. Instead of mechanical check valves, the difference of flow resistance in narrow channels caused by the temperature dependence of liquid viscosity is utilized as the basis of the valve effect. This method allows a flexible control of the pump function, including bi-directional pumping. A prototype device actuated by a piezoelectric element was designed and fabricated to confirm the pump function. The fluidic and thermal conditions for the pump actuation, and the characteristics of its behavior revealed by experiments are discussed.

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DO - 10.1109/memsys.1999.746791

M3 - 论文

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T2 - Proceedings of the 1999 12th IEEE International Conference on Micro Electro Mechanical Systems, MEMS

Y2 - 17 January 1999 through 21 January 1999

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Development of bi-directional valve-less micropump for liquid

Abstract

Conference

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