Development of 1D optical micro scanner driven by piezoelectric actuators

Takeshi Kobayashi; Jiunnjye Tsaur; Ryutaro Maeda

doi:10.1115/ipack2005-73431

Development of 1D optical micro scanner driven by piezoelectric actuators

Takeshi Kobayashi
, Jiunnjye Tsaur
, Ryutaro Maeda

National Institute of Advanced Industrial Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

1D optical micro scanners driven by piezoelectric actuators have designed, simulated, fabricated and tested. The newly designed micro scanners have a structure that rotation bars, hinges and PZT cantilevers support a square mirror (1mm × 1mm). Flat-structured micro scanners have been fabricated from Pt/PZT/Pt/Ti/SiO₂/SOI(Si/SiO₂/Si) multi-layered structure through conventional MEMS micro fabrication technologies. The micro scanner driven at 10 V showed an optical scan angle of 1.5 degree for the static actuation (60 Hz) and of 13 degree for the resonant actuation (4825 Hz), respectively.

Original language	English
Title of host publication	Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems
Subtitle of host publication	Advances in Electronic Packaging 2005
Publisher	American Society of Mechanical Engineers
Pages	789-792
Number of pages	4
ISBN (Print)	0791842002, 9780791842003
DOIs	https://doi.org/10.1115/ipack2005-73431
State	Published - 2005
Externally published	Yes
Event	ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005 - San Francisco, CA, United States Duration: 17 Jul 2005 → 22 Jul 2005

Publication series

Name	Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005
Volume	PART A

Conference

Conference	ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005
Country/Territory	United States
City	San Francisco, CA
Period	17/07/05 → 22/07/05

Access to Document

10.1115/ipack2005-73431

Cite this

Kobayashi, T., Tsaur, J., & Maeda, R. (2005). Development of 1D optical micro scanner driven by piezoelectric actuators. In Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005 (pp. 789-792). (Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005; Vol. PART A). American Society of Mechanical Engineers. https://doi.org/10.1115/ipack2005-73431

Kobayashi, Takeshi ; Tsaur, Jiunnjye ; Maeda, Ryutaro. / Development of 1D optical micro scanner driven by piezoelectric actuators. Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005. American Society of Mechanical Engineers, 2005. pp. 789-792 (Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005).

@inproceedings{4032002a84c64c6ba75a65a5bfcc5bec,

title = "Development of 1D optical micro scanner driven by piezoelectric actuators",

abstract = "1D optical micro scanners driven by piezoelectric actuators have designed, simulated, fabricated and tested. The newly designed micro scanners have a structure that rotation bars, hinges and PZT cantilevers support a square mirror (1mm × 1mm). Flat-structured micro scanners have been fabricated from Pt/PZT/Pt/Ti/SiO2/SOI(Si/SiO2/Si) multi-layered structure through conventional MEMS micro fabrication technologies. The micro scanner driven at 10 V showed an optical scan angle of 1.5 degree for the static actuation (60 Hz) and of 13 degree for the resonant actuation (4825 Hz), respectively.",

author = "Takeshi Kobayashi and Jiunnjye Tsaur and Ryutaro Maeda",

year = "2005",

doi = "10.1115/ipack2005-73431",

language = "英语",

isbn = "0791842002",

series = "Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005",

publisher = "American Society of Mechanical Engineers",

pages = "789--792",

booktitle = "Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems",

note = "ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005 ; Conference date: 17-07-2005 Through 22-07-2005",

}

Kobayashi, T, Tsaur, J & Maeda, R 2005, Development of 1D optical micro scanner driven by piezoelectric actuators. in Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005. Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005, vol. PART A, American Society of Mechanical Engineers, pp. 789-792, ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005, San Francisco, CA, United States, 17/07/05. https://doi.org/10.1115/ipack2005-73431

Development of 1D optical micro scanner driven by piezoelectric actuators. / Kobayashi, Takeshi; Tsaur, Jiunnjye; Maeda, Ryutaro.
Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005. American Society of Mechanical Engineers, 2005. p. 789-792 (Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005; Vol. PART A).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Development of 1D optical micro scanner driven by piezoelectric actuators

AU - Kobayashi, Takeshi

AU - Tsaur, Jiunnjye

AU - Maeda, Ryutaro

PY - 2005

Y1 - 2005

N2 - 1D optical micro scanners driven by piezoelectric actuators have designed, simulated, fabricated and tested. The newly designed micro scanners have a structure that rotation bars, hinges and PZT cantilevers support a square mirror (1mm × 1mm). Flat-structured micro scanners have been fabricated from Pt/PZT/Pt/Ti/SiO2/SOI(Si/SiO2/Si) multi-layered structure through conventional MEMS micro fabrication technologies. The micro scanner driven at 10 V showed an optical scan angle of 1.5 degree for the static actuation (60 Hz) and of 13 degree for the resonant actuation (4825 Hz), respectively.

AB - 1D optical micro scanners driven by piezoelectric actuators have designed, simulated, fabricated and tested. The newly designed micro scanners have a structure that rotation bars, hinges and PZT cantilevers support a square mirror (1mm × 1mm). Flat-structured micro scanners have been fabricated from Pt/PZT/Pt/Ti/SiO2/SOI(Si/SiO2/Si) multi-layered structure through conventional MEMS micro fabrication technologies. The micro scanner driven at 10 V showed an optical scan angle of 1.5 degree for the static actuation (60 Hz) and of 13 degree for the resonant actuation (4825 Hz), respectively.

UR - https://www.scopus.com/pages/publications/32844459696

U2 - 10.1115/ipack2005-73431

DO - 10.1115/ipack2005-73431

M3 - 会议稿件

AN - SCOPUS:32844459696

SN - 0791842002

SN - 9780791842003

T3 - Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005

SP - 789

EP - 792

BT - Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems

PB - American Society of Mechanical Engineers

T2 - ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005

Y2 - 17 July 2005 through 22 July 2005

ER -

Kobayashi T, Tsaur J, Maeda R. Development of 1D optical micro scanner driven by piezoelectric actuators. In Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005. American Society of Mechanical Engineers. 2005. p. 789-792. (Proceedings of the ASME/Pacific Rim Technical Conference and Exhibition on Integration and Packaging of MEMS, NEMS, and Electronic Systems: Advances in Electronic Packaging 2005). doi: 10.1115/ipack2005-73431

Development of 1D optical micro scanner driven by piezoelectric actuators

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