Development and preparation of refractive infrared microlens array device

Miniaturization and integration of optical devices arc important trends in the development of modern optical systems. In micro-optical devices, arrayed refractive imaging micro-optical devices mainly include microlens array devices, which arc widely used in imaging, metrology, beam shaping and other fields. In response to the special application requirements in the infrared band imaging, metrological measurement, laser processing and other fields, microlens array devices working in the infrared band have received extensive attention and have developed rapidly. This paper summarizes the development and preparation methods of infrared microlens array devices, including the preparation of infrared micro-optical devices with different materials and manufacturing methods, and the application of infrared micro-lens array devices in infrared band imaging, metrology, parallel processing, and beam homogenization. The challenges and opportunities of infrared microlens array devices and their manufacturing methods arc also analyzed.