Developing MEMS electric current sensors for end use monitoring of power supply: Part VIII - Segmentation design and empirical analysis of piezoelectric layers based on cantilever beam structure

Yang Liu; Yang Chen; Dong F. Wang; Yuan Lin; Xu Yang; Huan Liu; Yipeng Hou; Xuesong Shang; Ziqi Zhao; Toshihiro Itoh; Ryutaro Maeda

doi:10.1109/DTIP.2018.8394240

Developing MEMS electric current sensors for end use monitoring of power supply: Part VIII - Segmentation design and empirical analysis of piezoelectric layers based on cantilever beam structure

Yang Liu
, Yang Chen
, Dong F. Wang
, Yuan Lin
, Xu Yang
, Huan Liu
, Yipeng Hou
, Xuesong Shang
, Ziqi Zhao
, Toshihiro Itoh
, Ryutaro Maeda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper, the piezoelectric layer segmentation design, which is based on the cantilever structure, has been proposed to increase the output voltage. The piezoelectric layer of the cantilever structure is firstly divided into equal parts with the same number. A mathematical model of the output voltage in the horizontal, vertical and oblique directions has been established. Subsequently, COMSOL Multi-physics software is used to verify the theoretical derivation. The simulation results show that regardless of the segmentation angle, the output voltage is proportional to the number of slices when the piezoelectric layer is equally divided into the same number of pieces. As for the equally wide-divided piezoelectric layer, the segmentation along the direction vertical to diagonal direction can obtain the greatest output voltage value.

Original language	English
Title of host publication	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018
Editors	Romolo Marcelli, Yoshio Mita, Stewart Smith, Francis Pressecq, Pascal Nouet, Frederick Mailly, Peter Schneider
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1-4
Number of pages	4
ISBN (Electronic)	9781538661994
DOIs	https://doi.org/10.1109/DTIP.2018.8394240
State	Published - 22 Jun 2018
Externally published	Yes
Event	20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018 - Roma, Italy Duration: 22 May 2018 → 25 May 2018

Publication series

Name	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018

Conference

Conference	20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018
Country/Territory	Italy
City	Roma
Period	22/05/18 → 25/05/18

Keywords

Cantilever structure
Piezoelectric layer
Segmentation design
Sensitivity improvement
Theoretical

Access to Document

10.1109/DTIP.2018.8394240

Cite this

Liu, Y., Chen, Y., Wang, D. F., Lin, Y., Yang, X., Liu, H., Hou, Y., Shang, X., Zhao, Z., Itoh, T., & Maeda, R. (2018). Developing MEMS electric current sensors for end use monitoring of power supply: Part VIII - Segmentation design and empirical analysis of piezoelectric layers based on cantilever beam structure. In R. Marcelli, Y. Mita, S. Smith, F. Pressecq, P. Nouet, F. Mailly, & P. Schneider (Eds.), Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018 (pp. 1-4). (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DTIP.2018.8394240

Liu, Yang ; Chen, Yang ; Wang, Dong F. et al. / Developing MEMS electric current sensors for end use monitoring of power supply : Part VIII - Segmentation design and empirical analysis of piezoelectric layers based on cantilever beam structure. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018. editor / Romolo Marcelli ; Yoshio Mita ; Stewart Smith ; Francis Pressecq ; Pascal Nouet ; Frederick Mailly ; Peter Schneider. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 1-4 (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018).

@inproceedings{f961ba0946cd4d09ae6867ad2119975f,

title = "Developing MEMS electric current sensors for end use monitoring of power supply: Part VIII - Segmentation design and empirical analysis of piezoelectric layers based on cantilever beam structure",

abstract = "In this paper, the piezoelectric layer segmentation design, which is based on the cantilever structure, has been proposed to increase the output voltage. The piezoelectric layer of the cantilever structure is firstly divided into equal parts with the same number. A mathematical model of the output voltage in the horizontal, vertical and oblique directions has been established. Subsequently, COMSOL Multi-physics software is used to verify the theoretical derivation. The simulation results show that regardless of the segmentation angle, the output voltage is proportional to the number of slices when the piezoelectric layer is equally divided into the same number of pieces. As for the equally wide-divided piezoelectric layer, the segmentation along the direction vertical to diagonal direction can obtain the greatest output voltage value.",

keywords = "Cantilever structure, Piezoelectric layer, Segmentation design, Sensitivity improvement, Theoretical",

author = "Yang Liu and Yang Chen and Wang, \{Dong F.\} and Yuan Lin and Xu Yang and Huan Liu and Yipeng Hou and Xuesong Shang and Ziqi Zhao and Toshihiro Itoh and Ryutaro Maeda",

note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018 ; Conference date: 22-05-2018 Through 25-05-2018",

year = "2018",

month = jun,

day = "22",

doi = "10.1109/DTIP.2018.8394240",

language = "英语",

series = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1--4",

editor = "Romolo Marcelli and Yoshio Mita and Stewart Smith and Francis Pressecq and Pascal Nouet and Frederick Mailly and Peter Schneider",

booktitle = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018",

}

Liu, Y, Chen, Y, Wang, DF, Lin, Y, Yang, X, Liu, H, Hou, Y, Shang, X, Zhao, Z, Itoh, T & Maeda, R 2018, Developing MEMS electric current sensors for end use monitoring of power supply: Part VIII - Segmentation design and empirical analysis of piezoelectric layers based on cantilever beam structure. in R Marcelli, Y Mita, S Smith, F Pressecq, P Nouet, F Mailly & P Schneider (eds), Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018, Institute of Electrical and Electronics Engineers Inc., pp. 1-4, 20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018, Roma, Italy, 22/05/18. https://doi.org/10.1109/DTIP.2018.8394240

Developing MEMS electric current sensors for end use monitoring of power supply: Part VIII - Segmentation design and empirical analysis of piezoelectric layers based on cantilever beam structure. / Liu, Yang; Chen, Yang; Wang, Dong F. et al.
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018. ed. / Romolo Marcelli; Yoshio Mita; Stewart Smith; Francis Pressecq; Pascal Nouet; Frederick Mailly; Peter Schneider. Institute of Electrical and Electronics Engineers Inc., 2018. p. 1-4 (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Developing MEMS electric current sensors for end use monitoring of power supply

T2 - 20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018

AU - Liu, Yang

AU - Chen, Yang

AU - Wang, Dong F.

AU - Lin, Yuan

AU - Yang, Xu

AU - Liu, Huan

AU - Hou, Yipeng

AU - Shang, Xuesong

AU - Zhao, Ziqi

AU - Itoh, Toshihiro

AU - Maeda, Ryutaro

PY - 2018/6/22

Y1 - 2018/6/22

N2 - In this paper, the piezoelectric layer segmentation design, which is based on the cantilever structure, has been proposed to increase the output voltage. The piezoelectric layer of the cantilever structure is firstly divided into equal parts with the same number. A mathematical model of the output voltage in the horizontal, vertical and oblique directions has been established. Subsequently, COMSOL Multi-physics software is used to verify the theoretical derivation. The simulation results show that regardless of the segmentation angle, the output voltage is proportional to the number of slices when the piezoelectric layer is equally divided into the same number of pieces. As for the equally wide-divided piezoelectric layer, the segmentation along the direction vertical to diagonal direction can obtain the greatest output voltage value.

AB - In this paper, the piezoelectric layer segmentation design, which is based on the cantilever structure, has been proposed to increase the output voltage. The piezoelectric layer of the cantilever structure is firstly divided into equal parts with the same number. A mathematical model of the output voltage in the horizontal, vertical and oblique directions has been established. Subsequently, COMSOL Multi-physics software is used to verify the theoretical derivation. The simulation results show that regardless of the segmentation angle, the output voltage is proportional to the number of slices when the piezoelectric layer is equally divided into the same number of pieces. As for the equally wide-divided piezoelectric layer, the segmentation along the direction vertical to diagonal direction can obtain the greatest output voltage value.

KW - Cantilever structure

KW - Piezoelectric layer

KW - Segmentation design

KW - Sensitivity improvement

KW - Theoretical

UR - https://www.scopus.com/pages/publications/85050206041

U2 - 10.1109/DTIP.2018.8394240

DO - 10.1109/DTIP.2018.8394240

M3 - 会议稿件

AN - SCOPUS:85050206041

T3 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018

SP - 1

EP - 4

BT - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018

A2 - Marcelli, Romolo

A2 - Mita, Yoshio

A2 - Smith, Stewart

A2 - Pressecq, Francis

A2 - Nouet, Pascal

A2 - Mailly, Frederick

A2 - Schneider, Peter

PB - Institute of Electrical and Electronics Engineers Inc.

Y2 - 22 May 2018 through 25 May 2018

ER -

Liu Y, Chen Y, Wang DF, Lin Y, Yang X, Liu H et al. Developing MEMS electric current sensors for end use monitoring of power supply: Part VIII - Segmentation design and empirical analysis of piezoelectric layers based on cantilever beam structure. In Marcelli R, Mita Y, Smith S, Pressecq F, Nouet P, Mailly F, Schneider P, editors, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018. Institute of Electrical and Electronics Engineers Inc. 2018. p. 1-4. (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2018). doi: 10.1109/DTIP.2018.8394240

Developing MEMS electric current sensors for end use monitoring of power supply: Part VIII - Segmentation design and empirical analysis of piezoelectric layers based on cantilever beam structure

Abstract

Publication series

Conference

Keywords

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