Developing MEMS DC electric current sensor for end-use monitoring of DC power supply: Part V-corresponding relationship between polarization and output voltage

Xu Yang; Yupeng Fu; Dong F. Wang; Ji Zhao; Takeshi Kobayashi; Toshihiro Itoh; Ryutaro Maeda

doi:10.1109/DTIP.2015.7161020

Developing MEMS DC electric current sensor for end-use monitoring of DC power supply: Part V-corresponding relationship between polarization and output voltage

Xu Yang
, Yupeng Fu
, Dong F. Wang
, Ji Zhao
, Takeshi Kobayashi
, Toshihiro Itoh
, Ryutaro Maeda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Scopus citations

Abstract

A bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed in DTIP 2011. A linear relationship between the peak value of the impulsive output voltage and the DC current was obtained based on a macro-scale prototype device. In DTIP 2013, an oscillating type MEMS DC current sensor with integration of actuating and sensing elements was further proposed. By using a micro-scale prototype device, the maximum value of the output voltage was constantly measured and was found to linearly increase with the DC current. In present study (DTIP 2015), a bending type MEMS-scale DC current sensor device with three parallel PZT partition plates, was fabricated for preliminary examination. The output voltage monotonically increases with the increasing of the current and is in accordance with the variation of the theoretical magnetic force. While the corresponding relationship between polarization and output voltage is not clear. Compared with commercial Hall-effect devices, the proposed passive MEMS DC current sensor has two significant features of power-free passive sensing and two-wire direct measuring without using separator.

Original language	English
Title of host publication	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015
Editors	Gerold Schropfer, Francis Pressecq, Marta Rencz, Peter Schneider, Yoshio Mita, Benoit Charlot, Pascal Nouet
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781479986255
DOIs	https://doi.org/10.1109/DTIP.2015.7161020
State	Published - 16 Jul 2015
Externally published	Yes
Event	17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 - Montpellier, France Duration: 27 Apr 2015 → 30 Apr 2015

Publication series

Name	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015

Conference

Conference	17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015
Country/Territory	France
City	Montpellier
Period	27/04/15 → 30/04/15

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Keywords

DC power supply
Electricity end-use monitoring
MEMS DC current sensor
Performance of PZT plates after etching
Power-free
Separator-free
Two-wire electric appliances

Access to Document

10.1109/DTIP.2015.7161020

Cite this

Yang, X., Fu, Y., Wang, D. F., Zhao, J., Kobayashi, T., Itoh, T., & Maeda, R. (2015). Developing MEMS DC electric current sensor for end-use monitoring of DC power supply: Part V-corresponding relationship between polarization and output voltage. In G. Schropfer, F. Pressecq, M. Rencz, P. Schneider, Y. Mita, B. Charlot, & P. Nouet (Eds.), Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 Article 7161020 (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DTIP.2015.7161020

Yang, Xu ; Fu, Yupeng ; Wang, Dong F. et al. / Developing MEMS DC electric current sensor for end-use monitoring of DC power supply : Part V-corresponding relationship between polarization and output voltage. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015. editor / Gerold Schropfer ; Francis Pressecq ; Marta Rencz ; Peter Schneider ; Yoshio Mita ; Benoit Charlot ; Pascal Nouet. Institute of Electrical and Electronics Engineers Inc., 2015. (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015).

@inproceedings{eac030e05a3a47b49a3c901061c1f856,

title = "Developing MEMS DC electric current sensor for end-use monitoring of DC power supply: Part V-corresponding relationship between polarization and output voltage",

abstract = "A bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed in DTIP 2011. A linear relationship between the peak value of the impulsive output voltage and the DC current was obtained based on a macro-scale prototype device. In DTIP 2013, an oscillating type MEMS DC current sensor with integration of actuating and sensing elements was further proposed. By using a micro-scale prototype device, the maximum value of the output voltage was constantly measured and was found to linearly increase with the DC current. In present study (DTIP 2015), a bending type MEMS-scale DC current sensor device with three parallel PZT partition plates, was fabricated for preliminary examination. The output voltage monotonically increases with the increasing of the current and is in accordance with the variation of the theoretical magnetic force. While the corresponding relationship between polarization and output voltage is not clear. Compared with commercial Hall-effect devices, the proposed passive MEMS DC current sensor has two significant features of power-free passive sensing and two-wire direct measuring without using separator.",

keywords = "DC power supply, Electricity end-use monitoring, MEMS DC current sensor, Performance of PZT plates after etching, Power-free, Separator-free, Two-wire electric appliances",

author = "Xu Yang and Yupeng Fu and Wang, \{Dong F.\} and Ji Zhao and Takeshi Kobayashi and Toshihiro Itoh and Ryutaro Maeda",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 ; Conference date: 27-04-2015 Through 30-04-2015",

year = "2015",

month = jul,

day = "16",

doi = "10.1109/DTIP.2015.7161020",

language = "英语",

series = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

editor = "Gerold Schropfer and Francis Pressecq and Marta Rencz and Peter Schneider and Yoshio Mita and Benoit Charlot and Pascal Nouet",

booktitle = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015",

}

Yang, X, Fu, Y, Wang, DF, Zhao, J, Kobayashi, T, Itoh, T & Maeda, R 2015, Developing MEMS DC electric current sensor for end-use monitoring of DC power supply: Part V-corresponding relationship between polarization and output voltage. in G Schropfer, F Pressecq, M Rencz, P Schneider, Y Mita, B Charlot & P Nouet (eds), Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015., 7161020, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015, Institute of Electrical and Electronics Engineers Inc., 17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015, Montpellier, France, 27/04/15. https://doi.org/10.1109/DTIP.2015.7161020

Developing MEMS DC electric current sensor for end-use monitoring of DC power supply: Part V-corresponding relationship between polarization and output voltage. / Yang, Xu; Fu, Yupeng; Wang, Dong F. et al.
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015. ed. / Gerold Schropfer; Francis Pressecq; Marta Rencz; Peter Schneider; Yoshio Mita; Benoit Charlot; Pascal Nouet. Institute of Electrical and Electronics Engineers Inc., 2015. 7161020 (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Developing MEMS DC electric current sensor for end-use monitoring of DC power supply

T2 - 17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015

AU - Yang, Xu

AU - Fu, Yupeng

AU - Wang, Dong F.

AU - Zhao, Ji

AU - Kobayashi, Takeshi

AU - Itoh, Toshihiro

AU - Maeda, Ryutaro

PY - 2015/7/16

Y1 - 2015/7/16

N2 - A bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed in DTIP 2011. A linear relationship between the peak value of the impulsive output voltage and the DC current was obtained based on a macro-scale prototype device. In DTIP 2013, an oscillating type MEMS DC current sensor with integration of actuating and sensing elements was further proposed. By using a micro-scale prototype device, the maximum value of the output voltage was constantly measured and was found to linearly increase with the DC current. In present study (DTIP 2015), a bending type MEMS-scale DC current sensor device with three parallel PZT partition plates, was fabricated for preliminary examination. The output voltage monotonically increases with the increasing of the current and is in accordance with the variation of the theoretical magnetic force. While the corresponding relationship between polarization and output voltage is not clear. Compared with commercial Hall-effect devices, the proposed passive MEMS DC current sensor has two significant features of power-free passive sensing and two-wire direct measuring without using separator.

AB - A bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed in DTIP 2011. A linear relationship between the peak value of the impulsive output voltage and the DC current was obtained based on a macro-scale prototype device. In DTIP 2013, an oscillating type MEMS DC current sensor with integration of actuating and sensing elements was further proposed. By using a micro-scale prototype device, the maximum value of the output voltage was constantly measured and was found to linearly increase with the DC current. In present study (DTIP 2015), a bending type MEMS-scale DC current sensor device with three parallel PZT partition plates, was fabricated for preliminary examination. The output voltage monotonically increases with the increasing of the current and is in accordance with the variation of the theoretical magnetic force. While the corresponding relationship between polarization and output voltage is not clear. Compared with commercial Hall-effect devices, the proposed passive MEMS DC current sensor has two significant features of power-free passive sensing and two-wire direct measuring without using separator.

KW - DC power supply

KW - Electricity end-use monitoring

KW - MEMS DC current sensor

KW - Performance of PZT plates after etching

KW - Power-free

KW - Separator-free

KW - Two-wire electric appliances

UR - https://www.scopus.com/pages/publications/84945950274

U2 - 10.1109/DTIP.2015.7161020

DO - 10.1109/DTIP.2015.7161020

M3 - 会议稿件

AN - SCOPUS:84945950274

T3 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015

BT - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015

A2 - Schropfer, Gerold

A2 - Pressecq, Francis

A2 - Rencz, Marta

A2 - Schneider, Peter

A2 - Mita, Yoshio

A2 - Charlot, Benoit

A2 - Nouet, Pascal

PB - Institute of Electrical and Electronics Engineers Inc.

Y2 - 27 April 2015 through 30 April 2015

ER -

Yang X, Fu Y, Wang DF, Zhao J, Kobayashi T, Itoh T et al. Developing MEMS DC electric current sensor for end-use monitoring of DC power supply: Part V-corresponding relationship between polarization and output voltage. In Schropfer G, Pressecq F, Rencz M, Schneider P, Mita Y, Charlot B, Nouet P, editors, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015. Institute of Electrical and Electronics Engineers Inc. 2015. 7161020. (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015). doi: 10.1109/DTIP.2015.7161020

Developing MEMS DC electric current sensor for end-use monitoring of DC power supply: Part V-corresponding relationship between polarization and output voltage

Abstract

Publication series

Conference

UN SDGs

Keywords

Access to Document

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