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Developing MEMS DC electric current sensor for end-use monitoring of DC power supply

  • Kohei Isagawa
  • , Dong F. Wang
  • , Takeshi Kobayashi
  • , Toshihiro Itoh
  • , Ryutaro Maeda

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

15 Scopus citations

Abstract

A non-drive, non-contact MEMS DC electric current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord has been proposed. A micro magnet is integrated into the MEMS-scale DC sensor and the appropriate position for locating the micro magnet has been theoretically pinpointed. A macro-scale prototype DC sensor was therefore fabricated, and an impulse piezoelectric voltage output can be clearly detected out when a DC electric current was applied to a two-wire electrical appliance cord. A linear relationship between the detected peak value of the impulse output voltage and the applied DC electric current was further obtained based on the empirical measurements. After the demonstration of the macro-scale prototype DC sensor, the MEMS-scale DC sensor has been then theoretically designed from the view point of reasonable output voltage measurements, and preliminarily micro-fabricated for further characterizations.

Original languageEnglish
Title of host publicationDTIP 2011 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Pages231-236
Number of pages6
StatePublished - 2011
Externally publishedYes
Event2011 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2011 - Aix-en-Provence, France
Duration: 11 May 201113 May 2011

Publication series

NameDTIP 2011 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

Conference

Conference2011 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2011
Country/TerritoryFrance
CityAix-en-Provence
Period11/05/1113/05/11

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

  1. SDG 7 - Affordable and Clean Energy
    SDG 7 Affordable and Clean Energy

Keywords

  • DC power supply
  • Electricity end-use monitoring
  • MEMS DC sensor
  • Non-contact
  • Non-drive
  • PZT
  • Two-wire cord

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