TY - GEN
T1 - Developing MEMS DC electric current sensor for end-use monitoring of DC power supply
T2 - 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013
AU - Suzuki, Yasuhiro
AU - Wang, Dong F.
AU - Kobayashi, Takeshi
AU - Suwa, Yosuke
AU - Itoh, Toshihiro
AU - Maeda, Ryutaro
PY - 2013
Y1 - 2013
N2 - A passive (power-less), bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed in our past work (DTIP 2011). Recently, a MEMS-scale prototype DC sensor, comprised of 5 parallel PZT plates, was micro-fabricated for preliminarily examination (DTIP 2012). Different from the results of the macro-scale prototype DC sensor, impulsive piezoelectric output voltages accompanying with a gradual decrease in decay were detected when the applied DC electric current was varied from 0.5 A to 2.5 A. A linear relationship between the detected peak value of the impulse output voltage and the applied DC electric current was also obtained but with a higher slope compared to the result of the macro-scale hand-made prototype DC sensor. In present study however (DTIP 2013), a novel oscillating type MEMS DC current sensor was further proposed. Its applicability to constantly measure the DC current without using cord separator was preliminarily verified.
AB - A passive (power-less), bending type MEMS DC current sensor to satisfy the increasing needs of DC power supply for monitoring the electricity consumption by either one-wire or two-wire appliance cord was proposed in our past work (DTIP 2011). Recently, a MEMS-scale prototype DC sensor, comprised of 5 parallel PZT plates, was micro-fabricated for preliminarily examination (DTIP 2012). Different from the results of the macro-scale prototype DC sensor, impulsive piezoelectric output voltages accompanying with a gradual decrease in decay were detected when the applied DC electric current was varied from 0.5 A to 2.5 A. A linear relationship between the detected peak value of the impulse output voltage and the applied DC electric current was also obtained but with a higher slope compared to the result of the macro-scale hand-made prototype DC sensor. In present study however (DTIP 2013), a novel oscillating type MEMS DC current sensor was further proposed. Its applicability to constantly measure the DC current without using cord separator was preliminarily verified.
KW - Actuating and sensing
KW - Constant measurement
KW - End-use of monitoring
KW - Integration
KW - MEMS DC current sensor
KW - Piezoelectric plates
KW - Two-wire electric appliances
UR - https://www.scopus.com/pages/publications/84883068114
M3 - 会议稿件
AN - SCOPUS:84883068114
SN - 9781467344777
T3 - 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013
BT - 2013 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2013
Y2 - 16 April 2013 through 18 April 2013
ER -
