Developing an e-service-based CAPP system for silicon surface micromanufacturing

In this paper, we put forward a kind of e-service-driven process-planning methodology to support the 'top-down' design flow of microcomponents. Some key enabling techniques, such as sectioning different types of layers, sequencing the 'process' flow, itemising the 'operation' set of each 'process' and generating masks, are described in detail. Moreover, a process-planning prototype is developed on the basis of Java-oriented architecture. Finally, a running example related to micromirror is presented so as to verify the above methodology and the correspondent enabling techniques.