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Determination of Young's modulus and internal stress from natural frequency of micro beam

Research output: Contribution to journalArticlepeer-review

Abstract

Young's modulus and internal stress of micro beams are determined from array of sensors made of silicic micro-cantilevers and optical fibers. Coupling of optical fibers is used to detect the transverse natural frequency of the silicic micro-cantilever. The method is effective for analyzing the mechanical property of microstructure.

Original languageEnglish
Pages (from-to)55-58
Number of pages4
JournalHsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University
Volume34
Issue number5
StatePublished - May 2000

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