Abstract
Young's modulus and internal stress of micro beams are determined from array of sensors made of silicic micro-cantilevers and optical fibers. Coupling of optical fibers is used to detect the transverse natural frequency of the silicic micro-cantilever. The method is effective for analyzing the mechanical property of microstructure.
| Original language | English |
|---|---|
| Pages (from-to) | 55-58 |
| Number of pages | 4 |
| Journal | Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University |
| Volume | 34 |
| Issue number | 5 |
| State | Published - May 2000 |
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