@inproceedings{2ea7ef42120241f0838164f98637e3f1,
title = "Design of high precision imprint tool",
abstract = "Imprint lithography technique is introduced in this paper. Imprint tool is one of the key steps of imprint lithography process. In consideration of the fact that the imprint process control is performed in room temperature, replicating patterns is realized by press system and the nanometer positioning driving system of imprint tool is illustrated. Combine ball screw with PZT, Macro-Micro two-level control is accomplished. The developed imprint tool is characterized by simple structure, low cost and the ability of replica with different feature sizes. The several results of imprint are exhibited.",
keywords = "High precision, Imprint lithography, Imprint tool, Positioning",
author = "Le Yan and Hongzhong Liu",
year = "2010",
doi = "10.1109/MACE.2010.5536527",
language = "英语",
isbn = "9781424477388",
series = "2010 International Conference on Mechanic Automation and Control Engineering, MACE2010",
pages = "6165--6167",
booktitle = "2010 International Conference on Mechanic Automation and Control Engineering, MACE2010",
note = "2010 International Conference on Mechanic Automation and Control Engineering, MACE2010 ; Conference date: 26-06-2010 Through 28-06-2010",
}