@inproceedings{44c9515b9e464189a93620ff9e3a91ed,
title = "Design of a three-component force sensor based on MEMS strain gauges",
abstract = "This paper presents a three-component force sensor with MEMS gauges attached to its sensitive beams, which could be monolithically machined without assembly. All the sensitive areas of the dynamometer are designed on outer surfaces, which could contribute to the bond of gold wires onto the MEMS chips. Rough theoretical models are abstracted based on Euler beam theories, and Wheastone bridge circuits are provided according to the finite element simulations under loadings. Optimizations of dimensions are discussed to obtain isotropic sensitive outputs and minimized coupling errors. Finally with the help of simulation software, the safty factor and natural frequencies are also given. This design puts forward a solution with cost effective and maintenance friendly for both static and dynamic force measurements.",
keywords = "MEMS application, MEMS gauge, force measurement, three-component force sensor",
author = "Yingxue Li and Yulong Zhao and Minghao Zhang and Peng Wang",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015 ; Conference date: 07-04-2015 Through 11-04-2015",
year = "2015",
month = jul,
day = "1",
doi = "10.1109/NEMS.2015.7147500",
language = "英语",
series = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "597--601",
booktitle = "2015 IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015",
}