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Design of a novel uncooled infrared focal plane array

  • Binbin Jiao
  • , Dapeng Chen
  • , Chaobo Li
  • , Shali Shi
  • , Tianchun Ye
  • , Qingchuan Zhang
  • , Zheying Guo
  • , Fengliang Dong
  • , Zhenyu Miao
  • CAS - Institute of Microelectronics
  • University of Science and Technology of China

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations

Abstract

This paper presents the optimized design of a novel Focal Plane Array (FPA) structure for opt-mechanical uncooled infrared imaging system. The FPA structure is a bi-material micro-cantilever array which without Si substrate and with thermal isolation organ. In the paper, we build up series of model to describe the structure's IR absorb, heat exchange and thermal-mechanical characters. To optimize the parameter for a given pixel size (200 μm × 200 μm ) and certain materials, we have studied the number of deforming cantilever and given out an optimal value. The sensitivity of the optimized structure is calculated out to be 12.2 × 10-3deg/K. which means with the optical readout system we have reported [1], the NETD can get 1.6 mK.

Original languageEnglish
Title of host publicationProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages430-433
Number of pages4
DOIs
StatePublished - 2006
Externally publishedYes
Event1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China
Duration: 18 Jan 200621 Jan 2006

Publication series

NameProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Conference

Conference1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Country/TerritoryChina
CityZhuhai
Period18/01/0621/01/06

Keywords

  • Bi-material cantilever
  • Focal plane array (FPA)
  • MEMS
  • Optomechanical

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