@inproceedings{ce9d6956f75342c1a74709b80ec79dc0,
title = "Design of a novel uncooled infrared focal plane array",
abstract = "This paper presents the optimized design of a novel Focal Plane Array (FPA) structure for opt-mechanical uncooled infrared imaging system. The FPA structure is a bi-material micro-cantilever array which without Si substrate and with thermal isolation organ. In the paper, we build up series of model to describe the structure's IR absorb, heat exchange and thermal-mechanical characters. To optimize the parameter for a given pixel size (200 μm × 200 μm ) and certain materials, we have studied the number of deforming cantilever and given out an optimal value. The sensitivity of the optimized structure is calculated out to be 12.2 × 10-3deg/K. which means with the optical readout system we have reported [1], the NETD can get 1.6 mK.",
keywords = "Bi-material cantilever, Focal plane array (FPA), MEMS, Optomechanical",
author = "Binbin Jiao and Dapeng Chen and Chaobo Li and Shali Shi and Tianchun Ye and Qingchuan Zhang and Zheying Guo and Fengliang Dong and Zhenyu Miao",
year = "2006",
doi = "10.1109/NEMS.2006.334792",
language = "英语",
isbn = "1424401402",
series = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",
pages = "430--433",
booktitle = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",
note = "1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS ; Conference date: 18-01-2006 Through 21-01-2006",
}