Design of 3D ARROW based Mach-Zehnder pressure sensor

Zhong Yu; Zhuangde Jiang; Rong Li; Hairong Wang

Design of 3D ARROW based Mach-Zehnder pressure sensor

Zhong Yu
, Zhuangde Jiang
, Rong Li
, Hairong Wang

School of Mechanical Engineering

Xi'an Jiaotong University
Xi'an Institute of Electromechanical Information Technology

Research output: Contribution to journal › Article › peer-review

Abstract

The BCB/SiO₂ vertically coupling ARROW pressure sensor is presented to reduce the coupling length and improve the coupling efficient. The sensor consists of two stacked ARROW separated by the metal film and two 3 dB vertical coupler. The structure parameters of the ARROW are studied by the finite element method. The index distribution by the stress on the sensing arm is calculated to design the structure parameters. The relationship between pressure and the output change in the sensing arm is finally analyzed by the beam propagation method (BPM). The Simulated results obtained for this device represent a significant improvement in performance by adjusting the second clad of the upper waveguide. The device size is reduced without bend coupling waveguide and the pressure measurement is realized.

Original language	English
Pages (from-to)	522-529+534
Journal	Bandaoti Guangdian/Semiconductor Optoelectronics
Volume	31
Issue number	4
State	Published - Aug 2010

Keywords

Anti-resonant reflecting optical waveguide (ARROW)
Beam propagation method
Finite element method (FEM)
Pressure sensors

Cite this

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title = "Design of 3D ARROW based Mach-Zehnder pressure sensor",

abstract = "The BCB/SiO2 vertically coupling ARROW pressure sensor is presented to reduce the coupling length and improve the coupling efficient. The sensor consists of two stacked ARROW separated by the metal film and two 3 dB vertical coupler. The structure parameters of the ARROW are studied by the finite element method. The index distribution by the stress on the sensing arm is calculated to design the structure parameters. The relationship between pressure and the output change in the sensing arm is finally analyzed by the beam propagation method (BPM). The Simulated results obtained for this device represent a significant improvement in performance by adjusting the second clad of the upper waveguide. The device size is reduced without bend coupling waveguide and the pressure measurement is realized.",

keywords = "Anti-resonant reflecting optical waveguide (ARROW), Beam propagation method, Finite element method (FEM), Pressure sensors",

author = "Zhong Yu and Zhuangde Jiang and Rong Li and Hairong Wang",

year = "2010",

month = aug,

language = "英语",

volume = "31",

pages = "522--529+534",

journal = "Bandaoti Guangdian/Semiconductor Optoelectronics",

issn = "1001-5868",

publisher = "China National Publishing Industry Trading Corporation",

number = "4",

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TY - JOUR

T1 - Design of 3D ARROW based Mach-Zehnder pressure sensor

AU - Yu, Zhong

AU - Jiang, Zhuangde

AU - Li, Rong

AU - Wang, Hairong

PY - 2010/8

Y1 - 2010/8

N2 - The BCB/SiO2 vertically coupling ARROW pressure sensor is presented to reduce the coupling length and improve the coupling efficient. The sensor consists of two stacked ARROW separated by the metal film and two 3 dB vertical coupler. The structure parameters of the ARROW are studied by the finite element method. The index distribution by the stress on the sensing arm is calculated to design the structure parameters. The relationship between pressure and the output change in the sensing arm is finally analyzed by the beam propagation method (BPM). The Simulated results obtained for this device represent a significant improvement in performance by adjusting the second clad of the upper waveguide. The device size is reduced without bend coupling waveguide and the pressure measurement is realized.

AB - The BCB/SiO2 vertically coupling ARROW pressure sensor is presented to reduce the coupling length and improve the coupling efficient. The sensor consists of two stacked ARROW separated by the metal film and two 3 dB vertical coupler. The structure parameters of the ARROW are studied by the finite element method. The index distribution by the stress on the sensing arm is calculated to design the structure parameters. The relationship between pressure and the output change in the sensing arm is finally analyzed by the beam propagation method (BPM). The Simulated results obtained for this device represent a significant improvement in performance by adjusting the second clad of the upper waveguide. The device size is reduced without bend coupling waveguide and the pressure measurement is realized.

KW - Anti-resonant reflecting optical waveguide (ARROW)

KW - Beam propagation method

KW - Finite element method (FEM)

KW - Pressure sensors

UR - https://www.scopus.com/pages/publications/77957774183

M3 - 文章

AN - SCOPUS:77957774183

SN - 1001-5868

VL - 31

SP - 522-529+534

JO - Bandaoti Guangdian/Semiconductor Optoelectronics

JF - Bandaoti Guangdian/Semiconductor Optoelectronics

IS - 4

ER -

Design of 3D ARROW based Mach-Zehnder pressure sensor

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Keywords

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