Design for micro-electro-mechanical systems devices based on three-dimensional features

To improve straightforwardness and reduce process complexity of micro-electro-mechanical systems (MEMS) design, a new design scheme is proposed for surface micromachined device. Based on the established three-dimensional features, the solid geometric models of MEMS devices were constructed efficiently with SolidWorks. Simultaneously, the mask layouts and process flow were automatically generated with the developed program based on the application programming interfaces of SolidWorks. A practical example shows that this method enables to design MEMS geometric models efficiently in a straightforward environment without tedious fabrication process. And SolidWorks serving as the basic development platform greatly reduces complexity of developing MEMS CAD tools.