TY - GEN
T1 - Design and Simulation of a Wide-Bandwidth CMUTs Array with Dual-Mixed radii and Multi Operating Modes
AU - Liu, Zichen
AU - Zhao, Libo
AU - Zhao, Yihe
AU - Li, Jie
AU - Li, Zhikang
AU - Bai, Yu
AU - Yang, Ping
AU - Lin, Qijing
AU - Li, Zixuan
AU - Yuan, Jiawei
AU - Jiang, Zhuangde
N1 - Publisher Copyright:
© 2021 IEEE.
PY - 2021/4/25
Y1 - 2021/4/25
N2 - A capacitive micromachined ultrasonic transducers (CMUTs) array with dual-mixed radii is designed to improve bandwidth and realize multi-modes operating for immersed ultrasonic applications. The two-size (TS) CMUT array is composed of two sub-arrays with different membrane radii, but the same cell arrangement. The two sub-arrays are separately connected to external power sources to achieve separate control of each array. An electromechanical-acoustic coupling simulation model of the TS-CMUTs array is established by finite element method to investigate their impedance and conductance properties under different DC voltages in the frequency domain. The results indicate that the designed CMUTs can operate with a significant improved frequency bandwidth ranging from 9.75 MHz to 13.35 MHz by adjusting the DC bias voltage. Compared with traditional CMUTs arrays, the proposed CMUTs array can contribute to an increase of up to 270% in the bandwidth.
AB - A capacitive micromachined ultrasonic transducers (CMUTs) array with dual-mixed radii is designed to improve bandwidth and realize multi-modes operating for immersed ultrasonic applications. The two-size (TS) CMUT array is composed of two sub-arrays with different membrane radii, but the same cell arrangement. The two sub-arrays are separately connected to external power sources to achieve separate control of each array. An electromechanical-acoustic coupling simulation model of the TS-CMUTs array is established by finite element method to investigate their impedance and conductance properties under different DC voltages in the frequency domain. The results indicate that the designed CMUTs can operate with a significant improved frequency bandwidth ranging from 9.75 MHz to 13.35 MHz by adjusting the DC bias voltage. Compared with traditional CMUTs arrays, the proposed CMUTs array can contribute to an increase of up to 270% in the bandwidth.
UR - https://www.scopus.com/pages/publications/85113308540
U2 - 10.1109/NEMS51815.2021.9451374
DO - 10.1109/NEMS51815.2021.9451374
M3 - 会议稿件
AN - SCOPUS:85113308540
T3 - Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
SP - 299
EP - 302
BT - Proceedings of the 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 16th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021
Y2 - 25 April 2021 through 29 April 2021
ER -