Design and research of imprinting stamp for MMI waveguide device

Micro and nano imprinting, an emerging technology developed for replacing the traditional photo lithography, has great potential application. In recent years, it has been applied to fabricate microcomponent such as the micro fluidic device, micro biology device, especially micro optical system. Replication and transformation of a stamp to the device is a core idea of imprinting lithography technology. The stamp was required to be reliable, stabile, and repeatable in the real application. Fabrication of PMMA polymer MMI device by direct micro imprinting technology is investigated in this paper. The imprinting stamp of a typical MMI device was designed according to requirements of the MMI and fabricated by micromachining technology. Then the stamp was used to fabricate the PMMA pattern by hot embossing. Finally micromachining processes influenced on the quality of stamp were analyzed and more discussion was given.