Design and performance test of MEMS tri-axial micro-force probe sensor

In this paper, an improved micro electro mechanical system (MEMS) tri-axial micro-force probe sensor based on piezoresistive effect was designed and its performance was tested. A cross-beam with a platform suspended within a frame formed the flexible structure of the sensing element and the terraced probe was formed with quartz fiber, so that the anti jamming capacity and sensitivity of the sensor were significantly improved. The overload-protection element was designed to protect the sensor and the final sensor was 4 mm × 4 mm × 16 mm. Then the sensor was tested by the tri-axial precision test bench and analytical balance, and the performance test results show that the sensitivity of the sensor is better than 0.0106 mV/μN, the resolution is better than 3 μN and the linearity error is better than 0.94% of full scale. Therefore, with small volume, low cost, high sensitivity and resolution, good linearity and anti jamming, the proposed sensor will be widely used in the field of micro-force testing.