@inproceedings{48cadc15cda74ebfa7dec5d5b1cc4a1e,
title = "Design and fabrication of a microfluidic chip driven by dielectric elastomers",
abstract = "This paper presents a valveless microfluidic chip driven by dielectric elastomers (DEs). First, the planar DE actuator is designed and the diaphragm actuating performances were characterized. Then the micro chip, containing a pump chamber and a pair of nozzle/diffuser, is fabricated on SU-8 under exposure to UV-light with a mask. The diaphragm and the SU-8 is sealed and finally covered by a PMMA. The pumping and flow rate is tested and measured under high AC supply, and a maxim flow rate of 21.2μl is achieved under 3500V, 8Hz sine wave.",
keywords = "Dielectric elastomer, Diffuser/nozzle, Microfluidic chip, Su-8",
author = "Bo Li and Hualing Chen and Jiuhui Wu and Zicai Zhu and Dongmei Xia and Sufang Jing",
year = "2009",
doi = "10.1117/12.838431",
language = "英语",
isbn = "9780819478047",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "2nd International Conference on Smart Materials and Nanotechnology in Engineering",
note = "2nd International Conference on Smart Materials and Nanotechnology in Engineering ; Conference date: 08-07-2009 Through 11-07-2009",
}