TY - GEN
T1 - Design and fabrication of 1D and 2D micro scanners actuated by double layered PZT bimorph beams
AU - Tsaur, Jiunnjye
AU - Zhang, Lulu
AU - Maeda, R.
AU - Matsumoto, S.
AU - Khumpuang, Sommawan
AU - Wan, Jiangwen
N1 - Publisher Copyright:
© 2001 Japan Soc. Of Applied Physics.
PY - 2001
Y1 - 2001
N2 - Micro scanners including 1D scanner beams and 2D scanning micromirrors are designed and fabricated. In order to yield great actuation force and large scanning angle, double layered PZT beams were developed in this study. In the case of 1D scanner beams (750×230 μm2), the optical scanning angle was 41.2 degree while driven dynamically with 5 V (AC) at 2706 Hz. Under the applied bias of 10 V (DC), the optical deflection angle reached 34.3 degree. Combined with four double layered PZT bimorph beams, a 2D scanning micromirror was fabricated successfully.
AB - Micro scanners including 1D scanner beams and 2D scanning micromirrors are designed and fabricated. In order to yield great actuation force and large scanning angle, double layered PZT beams were developed in this study. In the case of 1D scanner beams (750×230 μm2), the optical scanning angle was 41.2 degree while driven dynamically with 5 V (AC) at 2706 Hz. Under the applied bias of 10 V (DC), the optical deflection angle reached 34.3 degree. Combined with four double layered PZT bimorph beams, a 2D scanning micromirror was fabricated successfully.
UR - https://www.scopus.com/pages/publications/84960351436
U2 - 10.1109/IMNC.2001.984161
DO - 10.1109/IMNC.2001.984161
M3 - 会议稿件
AN - SCOPUS:84960351436
T3 - 2001 International Microprocesses and Nanotechnology Conference, MNC 2001
SP - 204
EP - 205
BT - 2001 International Microprocesses and Nanotechnology Conference, MNC 2001
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - International Microprocesses and Nanotechnology Conference, MNC 2001
Y2 - 31 October 2001 through 2 November 2001
ER -