Abstract
A dielectric elastomer (DE) valveless micropump with plane diffuser/nozzle elements is investigated. The structure of the valveless micropump is designed by analyzing the effects of angle, length, minimum width of the diffuser-nozzle to the diffusivity. Based on UV-LIGA technique, the DE diaphragms and the SU-8 structure are bonded and the valveless micropump is accomplished. A DE diaphragms structure is conformed by experiment to realize the pumping. The maximum flow rate of 21.2 μL/min is achieved under 3500 V, 8 Hz sine wave. The valveless micropump with simple structure and lower cost demonstrates its further application foreground.
| Original language | English |
|---|---|
| Pages (from-to) | 92-95 |
| Number of pages | 4 |
| Journal | Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University |
| Volume | 43 |
| Issue number | 7 |
| State | Published - Jul 2009 |
Keywords
- Dielectric elastomer
- Micropump
- Structure design
Fingerprint
Dive into the research topics of 'Design and fabrication for valveless micropump driven by dielectric elastomer'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver