Deposition and patterning technique for realization of PZT thick film micro actuator

R. Maeda; J. Chu; A. Schroth; J. Akedo; M. Ichiki; Z. Wang; S. Yonekubo

doi:10.1109/IMNC.1998.730068

Deposition and patterning technique for realization of PZT thick film micro actuator

R. Maeda
, J. Chu
, A. Schroth
, J. Akedo
, M. Ichiki
, Z. Wang
, S. Yonekubo

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The PZT layer deposition and patterning were performed by various methods and the electrical properties and process performances were evaluated. New deposition method on non-planar surface was presentcd and proved to be effective.

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 1998
Subtitle of host publication	1998 International Microprocesses and Nanotechnology Conference
Editors	Hyung Joon Yoo, Shinji Okazaki, Jinho Ahn, Ohyun Kim, Masanori Komuro
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	255
Number of pages	1
ISBN (Electronic)	4930813832, 9784930813831
DOIs	https://doi.org/10.1109/IMNC.1998.730068
State	Published - 1998
Externally published	Yes
Event	1998 International Microprocesses and Nanotechnology Conference, MNC 1998 - Kyoungju, Korea, Republic of Duration: 13 Jul 1998 → 16 Jul 1998

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference
Volume	1998-July

Conference

Conference	1998 International Microprocesses and Nanotechnology Conference, MNC 1998
Country/Territory	Korea, Republic of
City	Kyoungju
Period	13/07/98 → 16/07/98

Access to Document

10.1109/IMNC.1998.730068

Cite this

Maeda, R., Chu, J., Schroth, A., Akedo, J., Ichiki, M., Wang, Z., & Yonekubo, S. (1998). Deposition and patterning technique for realization of PZT thick film micro actuator. In H. J. Yoo, S. Okazaki, J. Ahn, O. Kim, & M. Komuro (Eds.), Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference (pp. 255). Article 730068 (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; Vol. 1998-July). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.1998.730068

Maeda, R. ; Chu, J. ; Schroth, A. et al. / Deposition and patterning technique for realization of PZT thick film micro actuator. Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. editor / Hyung Joon Yoo ; Shinji Okazaki ; Jinho Ahn ; Ohyun Kim ; Masanori Komuro. Institute of Electrical and Electronics Engineers Inc., 1998. pp. 255 (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference).

@inproceedings{6b875bf0eada4337b2182774986b165b,

title = "Deposition and patterning technique for realization of PZT thick film micro actuator",

abstract = "The PZT layer deposition and patterning were performed by various methods and the electrical properties and process performances were evaluated. New deposition method on non-planar surface was presentcd and proved to be effective.",

author = "R. Maeda and J. Chu and A. Schroth and J. Akedo and M. Ichiki and Z. Wang and S. Yonekubo",

note = "Publisher Copyright: {\textcopyright} 1998 Institute of Electrical and Electronics Engineers Inc.. All rights reserved.; 1998 International Microprocesses and Nanotechnology Conference, MNC 1998 ; Conference date: 13-07-1998 Through 16-07-1998",

year = "1998",

doi = "10.1109/IMNC.1998.730068",

language = "英语",

series = "Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "255",

editor = "Yoo, \{Hyung Joon\} and Shinji Okazaki and Jinho Ahn and Ohyun Kim and Masanori Komuro",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 1998",

}

Maeda, R, Chu, J, Schroth, A, Akedo, J, Ichiki, M, Wang, Z & Yonekubo, S 1998, Deposition and patterning technique for realization of PZT thick film micro actuator. in HJ Yoo, S Okazaki, J Ahn, O Kim & M Komuro (eds), Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference., 730068, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference, vol. 1998-July, Institute of Electrical and Electronics Engineers Inc., pp. 255, 1998 International Microprocesses and Nanotechnology Conference, MNC 1998, Kyoungju, Korea, Republic of, 13/07/98. https://doi.org/10.1109/IMNC.1998.730068

Deposition and patterning technique for realization of PZT thick film micro actuator. / Maeda, R.; Chu, J.; Schroth, A. et al.
Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. ed. / Hyung Joon Yoo; Shinji Okazaki; Jinho Ahn; Ohyun Kim; Masanori Komuro. Institute of Electrical and Electronics Engineers Inc., 1998. p. 255 730068 (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference; Vol. 1998-July).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Deposition and patterning technique for realization of PZT thick film micro actuator

AU - Maeda, R.

AU - Chu, J.

AU - Schroth, A.

AU - Akedo, J.

AU - Ichiki, M.

AU - Wang, Z.

AU - Yonekubo, S.

PY - 1998

Y1 - 1998

N2 - The PZT layer deposition and patterning were performed by various methods and the electrical properties and process performances were evaluated. New deposition method on non-planar surface was presentcd and proved to be effective.

AB - The PZT layer deposition and patterning were performed by various methods and the electrical properties and process performances were evaluated. New deposition method on non-planar surface was presentcd and proved to be effective.

UR - https://www.scopus.com/pages/publications/85051428894

U2 - 10.1109/IMNC.1998.730068

DO - 10.1109/IMNC.1998.730068

M3 - 会议稿件

AN - SCOPUS:85051428894

T3 - Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference

SP - 255

BT - Digest of Papers - Microprocesses and Nanotechnology 1998

A2 - Yoo, Hyung Joon

A2 - Okazaki, Shinji

A2 - Ahn, Jinho

A2 - Kim, Ohyun

A2 - Komuro, Masanori

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 1998 International Microprocesses and Nanotechnology Conference, MNC 1998

Y2 - 13 July 1998 through 16 July 1998

ER -

Maeda R, Chu J, Schroth A, Akedo J, Ichiki M, Wang Z et al. Deposition and patterning technique for realization of PZT thick film micro actuator. In Yoo HJ, Okazaki S, Ahn J, Kim O, Komuro M, editors, Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference. Institute of Electrical and Electronics Engineers Inc. 1998. p. 255. 730068. (Digest of Papers - Microprocesses and Nanotechnology 1998: 1998 International Microprocesses and Nanotechnology Conference). doi: 10.1109/IMNC.1998.730068

Deposition and patterning technique for realization of PZT thick film micro actuator

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