Deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond

F. N. Li; J. W. Zhang; X. L. Wang; Z. C. Liu; W. Wang; J. Fu; T. F. Zhu; H. X. Wang

doi:10.1016/j.spmi.2016.09.030

Deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond

F. N. Li
, J. W. Zhang
, X. L. Wang
, Z. C. Liu
, W. Wang
, J. Fu
, T. F. Zhu
, H. X. Wang

Faculty of Electronic and Information Engineering

Xi'an Jiaotong University

Research output: Contribution to journal › Article › peer-review

11 Scopus citations

Abstract

In this study, deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond (O-/F-diamond) have been fabricated. Both of the O-/F-diamond surfaces have been formed on different areas of one (100) diamond sample by O₂ and CF₄ plasma. Pd has been evaporated on the O-/F-diamond surfaces to form Schottky contact, whose barrier heights have been investigated by X-ray photoelectron spectroscopy technique. Deep-ultraviolet detector based on F-diamond shows lower dark current than that based on O-diamond.

Original language	English
Pages (from-to)	258-265
Number of pages	8
Journal	Superlattices and Microstructures
Volume	100
DOIs	https://doi.org/10.1016/j.spmi.2016.09.030
State	Published - 1 Dec 2016

Keywords

CVD diamond
DUV detector
Fluorine-terminated
XPS

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10.1016/j.spmi.2016.09.030

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title = "Deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond",

abstract = "In this study, deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond (O-/F-diamond) have been fabricated. Both of the O-/F-diamond surfaces have been formed on different areas of one (100) diamond sample by O2 and CF4 plasma. Pd has been evaporated on the O-/F-diamond surfaces to form Schottky contact, whose barrier heights have been investigated by X-ray photoelectron spectroscopy technique. Deep-ultraviolet detector based on F-diamond shows lower dark current than that based on O-diamond.",

keywords = "CVD diamond, DUV detector, Fluorine-terminated, XPS",

author = "Li, \{F. N.\} and Zhang, \{J. W.\} and Wang, \{X. L.\} and Liu, \{Z. C.\} and W. Wang and J. Fu and Zhu, \{T. F.\} and Wang, \{H. X.\}",

note = "Publisher Copyright: {\textcopyright} 2016 Elsevier Ltd",

year = "2016",

month = dec,

day = "1",

doi = "10.1016/j.spmi.2016.09.030",

language = "英语",

volume = "100",

pages = "258--265",

journal = "Superlattices and Microstructures",

issn = "0749-6036",

publisher = "Academic Press Inc.",

}

TY - JOUR

T1 - Deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond

AU - Li, F. N.

AU - Zhang, J. W.

AU - Wang, X. L.

AU - Liu, Z. C.

AU - Wang, W.

AU - Fu, J.

AU - Zhu, T. F.

AU - Wang, H. X.

PY - 2016/12/1

Y1 - 2016/12/1

N2 - In this study, deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond (O-/F-diamond) have been fabricated. Both of the O-/F-diamond surfaces have been formed on different areas of one (100) diamond sample by O2 and CF4 plasma. Pd has been evaporated on the O-/F-diamond surfaces to form Schottky contact, whose barrier heights have been investigated by X-ray photoelectron spectroscopy technique. Deep-ultraviolet detector based on F-diamond shows lower dark current than that based on O-diamond.

AB - In this study, deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond (O-/F-diamond) have been fabricated. Both of the O-/F-diamond surfaces have been formed on different areas of one (100) diamond sample by O2 and CF4 plasma. Pd has been evaporated on the O-/F-diamond surfaces to form Schottky contact, whose barrier heights have been investigated by X-ray photoelectron spectroscopy technique. Deep-ultraviolet detector based on F-diamond shows lower dark current than that based on O-diamond.

KW - CVD diamond

KW - DUV detector

KW - Fluorine-terminated

KW - XPS

UR - https://www.scopus.com/pages/publications/84992076907

U2 - 10.1016/j.spmi.2016.09.030

DO - 10.1016/j.spmi.2016.09.030

M3 - 文章

AN - SCOPUS:84992076907

SN - 0749-6036

VL - 100

SP - 258

EP - 265

JO - Superlattices and Microstructures

JF - Superlattices and Microstructures

ER -

Deep-ultraviolet detectors based on oxygen-/fluorine-terminated (100) diamond

Abstract

Keywords

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