Crystal structure and microstructure of lead zirconate titanate (PZT) thin films with various Zr/Ti ratios grown by hybrid processing

Zhan Jie Wang; Yuki Aoki; Li Jun Yan; Hiroyuki Kokawa; Ryutaro Maeda

doi:10.1016/j.jcrysgro.2004.03.011

Crystal structure and microstructure of lead zirconate titanate (PZT) thin films with various Zr/Ti ratios grown by hybrid processing

Zhan Jie Wang
, Yuki Aoki
, Li Jun Yan
, Hiroyuki Kokawa
, Ryutaro Maeda

Research output: Contribution to journal › Article › peer-review

34 Scopus citations

Abstract

Lead zirconate titanate (Pb(Zr_xTi_1-x)O₃: PZT) thin films were fabricated on Pt/Ti/SiO₂/Si(1 0 0) substrates by a hybrid process comprising the sol-gel method and pulsed-laser deposition, using various targets of Pb(Zr_xTi_1-x)O₃ with Zr/Ti ratios of 70/30, 58/42, 52/48, 45/55 and 30/70. The effect of Zr/Ti ratio on the crystal structure and microstructure of the PZT films was investigated. The results of X-ray diffraction analysis indicated that the Zr/Ti ratio of the films fabricated using the target with a Zr/Ti ratio of 45/55 is close to that of the morphotropic phase boundary. The rosette structure was observed in Zr-rich PZT films, but not in Ti-rich PZT films. The PZT films fabricated using the target with a Zr/Ti ratio of 45/55 had a polycrystalline columnar microstructure extending throughout their thickness, and no pyrochlore phase on the surface was observed.

Original language	English
Pages (from-to)	92-99
Number of pages	8
Journal	Journal of Crystal Growth
Volume	267
Issue number	1-2
DOIs	https://doi.org/10.1016/j.jcrysgro.2004.03.011
State	Published - 15 Jun 2004
Externally published	Yes

Keywords

A1. Crystal structure
A3. Solid phase epitaxy
B1. Perovskites
B2. Ferroelectric materials
B2. Piezoelectric materials

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10.1016/j.jcrysgro.2004.03.011

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@article{53c7e9f2b5e0406dada1351569d2e5aa,

title = "Crystal structure and microstructure of lead zirconate titanate (PZT) thin films with various Zr/Ti ratios grown by hybrid processing",

abstract = "Lead zirconate titanate (Pb(ZrxTi1-x)O3: PZT) thin films were fabricated on Pt/Ti/SiO2/Si(1 0 0) substrates by a hybrid process comprising the sol-gel method and pulsed-laser deposition, using various targets of Pb(ZrxTi1-x)O3 with Zr/Ti ratios of 70/30, 58/42, 52/48, 45/55 and 30/70. The effect of Zr/Ti ratio on the crystal structure and microstructure of the PZT films was investigated. The results of X-ray diffraction analysis indicated that the Zr/Ti ratio of the films fabricated using the target with a Zr/Ti ratio of 45/55 is close to that of the morphotropic phase boundary. The rosette structure was observed in Zr-rich PZT films, but not in Ti-rich PZT films. The PZT films fabricated using the target with a Zr/Ti ratio of 45/55 had a polycrystalline columnar microstructure extending throughout their thickness, and no pyrochlore phase on the surface was observed.",

keywords = "A1. Crystal structure, A3. Solid phase epitaxy, B1. Perovskites, B2. Ferroelectric materials, B2. Piezoelectric materials",

author = "Wang, \{Zhan Jie\} and Yuki Aoki and Yan, \{Li Jun\} and Hiroyuki Kokawa and Ryutaro Maeda",

year = "2004",

month = jun,

day = "15",

doi = "10.1016/j.jcrysgro.2004.03.011",

language = "英语",

volume = "267",

pages = "92--99",

journal = "Journal of Crystal Growth",

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publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Crystal structure and microstructure of lead zirconate titanate (PZT) thin films with various Zr/Ti ratios grown by hybrid processing

AU - Wang, Zhan Jie

AU - Aoki, Yuki

AU - Yan, Li Jun

AU - Kokawa, Hiroyuki

AU - Maeda, Ryutaro

PY - 2004/6/15

Y1 - 2004/6/15

N2 - Lead zirconate titanate (Pb(ZrxTi1-x)O3: PZT) thin films were fabricated on Pt/Ti/SiO2/Si(1 0 0) substrates by a hybrid process comprising the sol-gel method and pulsed-laser deposition, using various targets of Pb(ZrxTi1-x)O3 with Zr/Ti ratios of 70/30, 58/42, 52/48, 45/55 and 30/70. The effect of Zr/Ti ratio on the crystal structure and microstructure of the PZT films was investigated. The results of X-ray diffraction analysis indicated that the Zr/Ti ratio of the films fabricated using the target with a Zr/Ti ratio of 45/55 is close to that of the morphotropic phase boundary. The rosette structure was observed in Zr-rich PZT films, but not in Ti-rich PZT films. The PZT films fabricated using the target with a Zr/Ti ratio of 45/55 had a polycrystalline columnar microstructure extending throughout their thickness, and no pyrochlore phase on the surface was observed.

AB - Lead zirconate titanate (Pb(ZrxTi1-x)O3: PZT) thin films were fabricated on Pt/Ti/SiO2/Si(1 0 0) substrates by a hybrid process comprising the sol-gel method and pulsed-laser deposition, using various targets of Pb(ZrxTi1-x)O3 with Zr/Ti ratios of 70/30, 58/42, 52/48, 45/55 and 30/70. The effect of Zr/Ti ratio on the crystal structure and microstructure of the PZT films was investigated. The results of X-ray diffraction analysis indicated that the Zr/Ti ratio of the films fabricated using the target with a Zr/Ti ratio of 45/55 is close to that of the morphotropic phase boundary. The rosette structure was observed in Zr-rich PZT films, but not in Ti-rich PZT films. The PZT films fabricated using the target with a Zr/Ti ratio of 45/55 had a polycrystalline columnar microstructure extending throughout their thickness, and no pyrochlore phase on the surface was observed.

KW - A1. Crystal structure

KW - A3. Solid phase epitaxy

KW - B1. Perovskites

KW - B2. Ferroelectric materials

KW - B2. Piezoelectric materials

UR - https://www.scopus.com/pages/publications/2942516636

U2 - 10.1016/j.jcrysgro.2004.03.011

DO - 10.1016/j.jcrysgro.2004.03.011

M3 - 文章

AN - SCOPUS:2942516636

SN - 0022-0248

VL - 267

SP - 92

EP - 99

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1-2

ER -

Crystal structure and microstructure of lead zirconate titanate (PZT) thin films with various Zr/Ti ratios grown by hybrid processing

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Keywords

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