@inproceedings{8cc097ec06744256b31eeab3c33beab2,
title = "Crescent shaped alignment marks applicable to self-alignment of micro-parts with and without positive and negative poles",
abstract = "A 'crescent-shaped' binding alignment mark, more applicable to the self-alignment than reported 'tear-drop/elliptical hole' pattern, has been designed and comparatively studied with other possible alignment marks. In order to further apply this novel design to micro-parts with positive and negative poles on the binding sites, a modified 'crescent-shaped' pattern with an insulated space area, defined as 'crescent-shaped/interval' for self-alignment of micro-parts with two poles has been therefore proposed and discussed. The fabrication process using micromachining has been studied and both the substrates and micro-parts with alignment marks have been fabricated for next self-alignment verification.",
keywords = "Alignment mark, Crescent-shaped pattern, Crescent-shaped/interval pattern, Overlap ratio, Positive and negative poles, Self-alignment, Surface energy",
author = "Shouhei Shiga and Wang, \{Dong F.\} and Takao Ishida and Ryutaro Maeda",
year = "2011",
language = "英语",
isbn = "9782355000133",
series = "DTIP 2011 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS",
pages = "180--183",
booktitle = "DTIP 2011 - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS",
note = "2011 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2011 ; Conference date: 11-05-2011 Through 13-05-2011",
}