Conception and design of a thermal valvless micropump

  • G. Manzoni
  • , S. Heisig
  • , T. Takano
  • , C. Kocer
  • , H. Goto
  • , T. Mihara
  • , R. Maeda

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

This paper describes the conception and design of a micropump for gas, with no moving or deformable parts, for use on the future sensor network system, which includes environment monitoring. This design is original because of the complete absence of moving parts for the pumping of gas. In fact, fluid movement was obtained by means of repetitive heating and cooling cycles of the gas, in the pump chamber. The prototyping work is on going and the first results are presented with particular emphasis on thermal characterization.

Original languageEnglish
Article number60360I
JournalProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume6036
DOIs
StatePublished - 2006
Externally publishedYes
EventBioMEMS and Nanotechnology II - Brisbane, Australia
Duration: 12 Dec 200514 Dec 2005

Keywords

  • Fluidic Microdiodes
  • Microcompressor
  • Microfluidics
  • Microheater
  • Micropump
  • Valveless

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