Chemical Vapor Deposition of Large-Sized Hexagonal WSe2 Crystals on Dielectric Substrates

  • Jianyi Chen
  • , Bo Liu
  • , Yanpeng Liu
  • , Wei Tang
  • , Chang Tai Nai
  • , Linjun Li
  • , Jian Zheng
  • , Libo Gao
  • , Yi Zheng
  • , Hyun Suk Shin
  • , Hu Young Jeong
  • , Kian Ping Loh

Research output: Contribution to journalArticlepeer-review

178 Scopus citations

Abstract

High-quality large-sized hexagoal WSe2 crystals can be grown on dielectric substrates using atmospheric chemical vapor deposition in the presence of hydrogen gas. These hexagonal crystals (lateral width >160 um) have a carrier mobility of 100 cm2 V-1 s-1 and a photoresponsivity of ≈1100 mA W-1, which is comparable to that of exfoliated flakes.

Original languageEnglish
Pages (from-to)6722-6727
Number of pages6
JournalAdvanced Materials
Volume27
Issue number42
DOIs
StatePublished - 1 Nov 2015
Externally publishedYes

Keywords

  • hexagonal crystals
  • transition metal dichalcogenides
  • tungsten diselenide

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