@inproceedings{5d0d06e549194aedade36aaebdead31c,
title = "Characterization of super-harmonic effect using piezoelectric film cantilever with a proof mass in the point",
abstract = "The super-harmonic effect has been studied using a piezoelectric micro-cantilever with a proof mass. The fabricated prototype device, comprised with a multilayer of Pt/Ti/PZT/Pt/Ti/SiO 2 deposited on a silicon-on-insulator (SOI) wafer, has been measured to have an eigenstate frequency of around 816 Hz. The driven frequencies of 204, 272, 409 and 816 Hz have been then converted into the resonant one via the super-harmonic vibration, corresponding to a sudden increase of output voltage, based on our preliminary characterizations.",
keywords = "Eigenstate frequency, Micro-cantilever, PZT thin film, Proof mass, Super-harmonic effect",
author = "Haruki Ishinabe and Takeshi Kobayashi and Wang, \{Dong F.\} and Toshihiro Itoh and Ryutaro Maeda",
year = "2012",
doi = "10.1109/NEMS.2012.6196851",
language = "英语",
isbn = "9781467311243",
series = "2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012",
pages = "615--618",
booktitle = "2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012",
note = "7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 ; Conference date: 05-03-2012 Through 08-03-2012",
}