TY - GEN
T1 - Capacitive micromachined ultrasonic transducers for biochemical detection with flexible high sensitivity
AU - Zhao, Yihe
AU - Lu, Dejiang
AU - Zhao, Libo
AU - Xia, Yong
AU - Li, Zhikang
AU - Li, Jie
AU - Zhang, Jiawang
AU - Jia, Chen
AU - Wang, Jiuhong
AU - Jiang, Zhuangde
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2018/4/24
Y1 - 2018/4/24
N2 - In this paper, we have designed and fabricated the capacitive micromachined ultrasonic transducers (CMUTs) by low temperature bonding process under 350 °C. And the electrospinning technology is innovatively applied as a coating method for the functionalization of CMUTs' top membrane to achieve a uniform fiber structure, which is beneficial to absorbing and releasing the biochemical gas, that is to say, it can be applied to recycling use. It was further demonstrated that the mass effect on functionalized CMUTs' resonant frequency has been distinctly intensified with the increase of direct current (DC) bias voltage Vbias between the top and bottom electrodes from 10V to 30V, the resonant frequency changes from 1.787 MHz to 1.664 MHz. Simultaneously volume sensitivity was calculated from 200.000 ppb/Hz to 78.125 ppb/Hz with the concentration of sulfur dioxide (SO2) from 100 ppm to 333 ppm. By applying appropriate Vbias, not only the volume sensitivity can be flexibly guaranteed, but also the energy consumption will be reduced.
AB - In this paper, we have designed and fabricated the capacitive micromachined ultrasonic transducers (CMUTs) by low temperature bonding process under 350 °C. And the electrospinning technology is innovatively applied as a coating method for the functionalization of CMUTs' top membrane to achieve a uniform fiber structure, which is beneficial to absorbing and releasing the biochemical gas, that is to say, it can be applied to recycling use. It was further demonstrated that the mass effect on functionalized CMUTs' resonant frequency has been distinctly intensified with the increase of direct current (DC) bias voltage Vbias between the top and bottom electrodes from 10V to 30V, the resonant frequency changes from 1.787 MHz to 1.664 MHz. Simultaneously volume sensitivity was calculated from 200.000 ppb/Hz to 78.125 ppb/Hz with the concentration of sulfur dioxide (SO2) from 100 ppm to 333 ppm. By applying appropriate Vbias, not only the volume sensitivity can be flexibly guaranteed, but also the energy consumption will be reduced.
UR - https://www.scopus.com/pages/publications/85047019716
U2 - 10.1109/MEMSYS.2018.8346708
DO - 10.1109/MEMSYS.2018.8346708
M3 - 会议稿件
AN - SCOPUS:85047019716
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 924
EP - 927
BT - 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
Y2 - 21 January 2018 through 25 January 2018
ER -
