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Cantilever-based transducer for molecules configuration research

  • Qinwen Huang
  • , Kai Li
  • , Binbin Jiao
  • , Tianchun Ye
  • , Dapeng Chen
  • , Yi Ou
  • , Chaobo Li
  • , Qingchuan Zhang
  • CAS - Institute of Microelectronics
  • University of Science and Technology of China

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Microfabricated cantilevers have recently become increasingly popular as transducers in chemical and biological sensors. Here, an evaluation of laboratory prototype that is microcantilever-based optical detection is demonstrated. Surface stress changes when molecules adsorb on cantilevers surface, which offers an attractive way to chemical and biological detection by measuring the bending of cantilevers. In this work, different figures of cantilevers were fabricated. Preliminary evaluation of these microfabricated cantilevers was performed by comparing the intensity of reflecting light on the end surfaces of different cantilever figures and the stability of different cantilever figures in liquid. The result demonstrated that triangle cantilever with paddle acting as a flat mirror has better performance of light reflecting and stability in liquid. Then, cantilevers-based sensors were used to detect the conformational changes in PNFPAM molecules with temperature changing.

Original languageEnglish
Title of host publicationProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages989-993
Number of pages5
DOIs
StatePublished - 2006
Externally publishedYes
Event1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China
Duration: 18 Jan 200621 Jan 2006

Publication series

NameProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Conference

Conference1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Country/TerritoryChina
CityZhuhai
Period18/01/0621/01/06

Keywords

  • Microcantilever
  • PNIPAM molecules
  • Surface stress
  • Transducer

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