BI-directional optical flow sensor for online microfluidic monitoring

  • Z. Yang
  • , S. Matsumoto
  • , J. Tsaur
  • , N. Ichikawa
  • , R. Maeda

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

A novel bi-directional drag force flow sensor using a laser interferometer combined with a micromachined structure is reported. Based on a simple principle of momentum transfer, the on-chip sensing element could be made compact in size and compatible with other functional microfluidic components. Therefore, the proposed flow sensor has a great possibility for online monitoring of integrated microfluidic devices, for which existing flow sensors have not been readily applicable. A fast response capability and a wide linear dynamic range up to 85 μl/min with the lower detection limit of 0.3 μl/min were successfully demonstrated through experiments.

Original languageEnglish
Title of host publicationMicro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference
Subtitle of host publication9th International Conference on Miniaturized Systems for Chemistry and Life Sciences
PublisherTransducer Research Foundation
Pages961-963
Number of pages3
ISBN (Print)0974361119, 9780974361116
StatePublished - 2005
Externally publishedYes
Event9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005 - Boston, MA, United States
Duration: 9 Oct 200513 Oct 2005

Publication series

NameMicro Total Analysis Systems - Proceedings of MicroTAS 2005 Conference: 9th International Conference on Miniaturized Systems for Chemistry and Life Sciences
Volume1

Conference

Conference9th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2005
Country/TerritoryUnited States
CityBoston, MA
Period9/10/0513/10/05

Keywords

  • Bi-directional flow
  • Drag force
  • Flow sensor
  • Laser interferometer

Fingerprint

Dive into the research topics of 'BI-directional optical flow sensor for online microfluidic monitoring'. Together they form a unique fingerprint.

Cite this