Bearing technology of voltage-controlled four-axis electrostatic suspension system with insulated electrodes

Based on the insulated electrodes, a technical proposal of voltage-controlled four-axis electrostatic suspension system was proposed. First, the measurement circuit of bearing system was given, and a low power consumption high voltage amplifier was introduced, which could reduce the power consumption of the actuator by over 70% under extreme conditions. Then the formula of electrostatic force acted on the rotor on basis of insulated electrodes was deduced, and a weighting coefficient was introduced to quantize the effect. Based on the model of electrostatic force, the controller was designed, and the suspension experiment was made. Experiment results show that the bearing system can suspend the rotor stably. Under the condition of reasonably quantizing the electrode insulation's effects on the measurement circuit and the electrostatic force model, the suspension system can function normally.