Analysis of manufacturing variation in a coupled microresonators array based on its designed values and measured eigenfrequencies

Manufacturing variation in the microfabrication process inevitably alters the size of the designed structure and thereafter influences the performance of the devices to some extent. A good knowledge of this effect will help the design and optimisation of the devices. In this study, the authors propose an analytical model to investigate the effect of manufacturing variation on the individual resonator in a chain of coupled micromechanical resonators. It is also used to estimate the variation caused by the manufacturing process based on the designed values and the measured eigenfrequencies.