Abstract
The primary uncertain factors in the elastic modulus measurement of microcomponent by micro-cantilever deflection are analyzed and the fuzzy mathematic method is introduced to the evaluation process. The relevant parameters are allowed to variate within a certain range, a new evaluation model is established based on fuzzy sets, where the stiffness constant of microcantilever beam is acquired by linear regression of the effective load-deflection curve with fuzzy weight, and the beam geometry dimensions regarded as Gaussian fuzzy numbers are obtained from programming of equivalent common sets by level-cuts concepts. The experiments of silicon (100) microcantilever beam are conducted, and the elastic modulus is calculated in ranges of different confidence levels, which is agreeable to the real situations. The qualitative uncertainties in the measurement can be absorbed by the established model with fuzzy parameters, which implies that the evaluated elastic modulus is more valuable for the practice.
| Original language | English |
|---|---|
| Pages (from-to) | 517-521 |
| Number of pages | 5 |
| Journal | Hsi-An Chiao Tung Ta Hsueh/Journal of Xi'an Jiaotong University |
| Volume | 39 |
| Issue number | 5 |
| State | Published - May 2005 |
Keywords
- Elastic modulus
- Fuzzy model
- Membership functions
- Microcantilever deflection
- Microcomponent