An Ultra-Stable MEMS Oscillator Based on High-Q Micromechanical Resonator and a Two-Stage Temperature Compensation System

Chun Wang; Yutao Xu; Gang Shao; Junsheng Lv; Xueyong Wei

doi:10.1109/NEMS67320.2025.11170103

An Ultra-Stable MEMS Oscillator Based on High-Q Micromechanical Resonator and a Two-Stage Temperature Compensation System

Chun Wang
, Yutao Xu
, Gang Shao
, Junsheng Lv
, Xueyong Wei

Xi'an Jiaotong University
XiangTeng Microelectronics
Xi’an Jiaotong University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

MEMS resonators are the core elements in precision clocks and sensitive resonant detectors. However, due to the large temperature coefficient of frequency (TCF) of single-crystal silicon, MEMS resonators suffer from frequency stability degradation caused by temperature drift. Here, we developed a two-stage temperature compensation system for highly stable oscillators' application based on the fuzzy PID control. Additionally, a MEMS disk resonator with quality factor approaching the limits from Akhiezer damping was designed and microfabricated. After packaging with the compensation system, the frequency drift of the developed MEMS oscillator was maintained within ± 0.063 ppm over 1800s, and its Allan deviation reached 0.225 ppb.

Original language	English
Title of host publication	2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	67-72
Number of pages	6
ISBN (Electronic)	9798331599126
DOIs	https://doi.org/10.1109/NEMS67320.2025.11170103
State	Published - 2025
Externally published	Yes
Event	20th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025 - Zhuhai, China Duration: 11 May 2025 → 14 May 2025

Publication series

Name	2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025

Conference

Conference	20th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025
Country/Territory	China
City	Zhuhai
Period	11/05/25 → 14/05/25

Access to Document

10.1109/NEMS67320.2025.11170103

Cite this

Wang, C., Xu, Y., Shao, G., Lv, J., & Wei, X. (2025). An Ultra-Stable MEMS Oscillator Based on High-Q Micromechanical Resonator and a Two-Stage Temperature Compensation System. In 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025 (pp. 67-72). (2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS67320.2025.11170103

Wang, Chun ; Xu, Yutao ; Shao, Gang et al. / An Ultra-Stable MEMS Oscillator Based on High-Q Micromechanical Resonator and a Two-Stage Temperature Compensation System. 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. pp. 67-72 (2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025).

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title = "An Ultra-Stable MEMS Oscillator Based on High-Q Micromechanical Resonator and a Two-Stage Temperature Compensation System",

abstract = "MEMS resonators are the core elements in precision clocks and sensitive resonant detectors. However, due to the large temperature coefficient of frequency (TCF) of single-crystal silicon, MEMS resonators suffer from frequency stability degradation caused by temperature drift. Here, we developed a two-stage temperature compensation system for highly stable oscillators' application based on the fuzzy PID control. Additionally, a MEMS disk resonator with quality factor approaching the limits from Akhiezer damping was designed and microfabricated. After packaging with the compensation system, the frequency drift of the developed MEMS oscillator was maintained within ± 0.063 ppm over 1800s, and its Allan deviation reached 0.225 ppb.",

author = "Chun Wang and Yutao Xu and Gang Shao and Junsheng Lv and Xueyong Wei",

note = "Publisher Copyright: {\textcopyright} 2025 IEEE.; 20th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025 ; Conference date: 11-05-2025 Through 14-05-2025",

year = "2025",

doi = "10.1109/NEMS67320.2025.11170103",

language = "英语",

series = "2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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}

Wang, C, Xu, Y, Shao, G, Lv, J & Wei, X 2025, An Ultra-Stable MEMS Oscillator Based on High-Q Micromechanical Resonator and a Two-Stage Temperature Compensation System. in 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025. 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025, Institute of Electrical and Electronics Engineers Inc., pp. 67-72, 20th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025, Zhuhai, China, 11/05/25. https://doi.org/10.1109/NEMS67320.2025.11170103

An Ultra-Stable MEMS Oscillator Based on High-Q Micromechanical Resonator and a Two-Stage Temperature Compensation System. / Wang, Chun; Xu, Yutao; Shao, Gang et al.
2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. p. 67-72 (2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - An Ultra-Stable MEMS Oscillator Based on High-Q Micromechanical Resonator and a Two-Stage Temperature Compensation System

AU - Wang, Chun

AU - Xu, Yutao

AU - Shao, Gang

AU - Lv, Junsheng

AU - Wei, Xueyong

PY - 2025

Y1 - 2025

N2 - MEMS resonators are the core elements in precision clocks and sensitive resonant detectors. However, due to the large temperature coefficient of frequency (TCF) of single-crystal silicon, MEMS resonators suffer from frequency stability degradation caused by temperature drift. Here, we developed a two-stage temperature compensation system for highly stable oscillators' application based on the fuzzy PID control. Additionally, a MEMS disk resonator with quality factor approaching the limits from Akhiezer damping was designed and microfabricated. After packaging with the compensation system, the frequency drift of the developed MEMS oscillator was maintained within ± 0.063 ppm over 1800s, and its Allan deviation reached 0.225 ppb.

AB - MEMS resonators are the core elements in precision clocks and sensitive resonant detectors. However, due to the large temperature coefficient of frequency (TCF) of single-crystal silicon, MEMS resonators suffer from frequency stability degradation caused by temperature drift. Here, we developed a two-stage temperature compensation system for highly stable oscillators' application based on the fuzzy PID control. Additionally, a MEMS disk resonator with quality factor approaching the limits from Akhiezer damping was designed and microfabricated. After packaging with the compensation system, the frequency drift of the developed MEMS oscillator was maintained within ± 0.063 ppm over 1800s, and its Allan deviation reached 0.225 ppb.

UR - https://www.scopus.com/pages/publications/105018740987

U2 - 10.1109/NEMS67320.2025.11170103

DO - 10.1109/NEMS67320.2025.11170103

M3 - 会议稿件

AN - SCOPUS:105018740987

T3 - 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025

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EP - 72

BT - 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 20th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025

Y2 - 11 May 2025 through 14 May 2025

ER -

Wang C, Xu Y, Shao G, Lv J, Wei X. An Ultra-Stable MEMS Oscillator Based on High-Q Micromechanical Resonator and a Two-Stage Temperature Compensation System. In 2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025. Institute of Electrical and Electronics Engineers Inc. 2025. p. 67-72. (2025 IEEE 20th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2025). doi: 10.1109/NEMS67320.2025.11170103

An Ultra-Stable MEMS Oscillator Based on High-Q Micromechanical Resonator and a Two-Stage Temperature Compensation System

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