An ultra-high pressure sensor with cylinder structure

Based on strain-resistance effect, an ultra-high pressure sensor has been developed with the range of 0-500 MPa. It is mainly composed of the elastic element and sensitive element. This sensor's range is determined by the elastic element's structure and material. In order to endure the ultra-high pressure, the elastic element's material is selected as spring steel, and its structures are analyzed and simulated. After that, the metal strain gauge as the sensitive element is packaged on the elastic element. Then the sensor is developed after some compensation processes are carried out. In the end, the sensor is calibrated. The results show that the sensor has good performance, such as the accuracy of 0.35%FS, which meets the requirements of aerospace, weapons and other fields.