An overview of MEMS S&A device and its application in the micro-detonated system

The integration of fuzes and initiators has been promoted by the development requirements of the miniaturized and intelligent ammunition, and the micro-detonated system integrated with S&A device is the key development direction. Initiators are considered the first component of the weapon system, and the safety and reliability of the initiators directly affect the safety and reliability of the weapon system. With the development of micro-electromechanical system (MEMS) initiators and the integration of fuze, in order to further improve the safety of the weapon system in the miniaturized and intelligent ammunition system, it is necessary to integrate the MEMS S&A device with the initiators, which is an important technical feature, to form a MEMS initiator with functional integration, high safety and reliability. MEMS S&A device is the key technology of the MEMS initiators' devices with safety-isolation function. This paper summarizes the development of MEMS S&A devices in micro-fuzes and the micro-detonated systems in recent years. Combined with comparative analysis, it analyzes and summarizes the driving principles, application platforms, process technologies, structural material characteristics and other aspects, and proposes a suitable structure for the MEMS initiators integrated with S&A devices, which provides a reference for the research on the design of MEMS initiators with safety-isolation function.