An integrated fabrication of sol-gel derived PZT thick films and SOI for 2D optical micromirror

J. Tsaur; T. Kobayashi; M. Ichiki; R. Maeda; T. Suga

doi:10.1109/OMEMS.2003.1233465

An integrated fabrication of sol-gel derived PZT thick films and SOI for 2D optical micromirror

J. Tsaur
, T. Kobayashi
, M. Ichiki
, R. Maeda
, T. Suga

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

This paper aims to improve the sol-gel process and demonstrate the integrated fabrication with the use of SOI wafers. The piezoelectric properties of the PZT and the silicon-based micromirror with a plane structure are also presented.

Original language	English
Title of host publication	2003 IEEE/LEOS International Conference on Optical MEMS
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	57-58
Number of pages	2
ISBN (Electronic)	078037830X, 9780780378308
DOIs	https://doi.org/10.1109/OMEMS.2003.1233465
State	Published - 2003
Externally published	Yes
Event	2003 IEEE/LEOS International Conference on Optical MEMS - Waikoloa, United States Duration: 18 Aug 2003 → 21 Aug 2003

Publication series

Name	2003 IEEE/LEOS International Conference on Optical MEMS

Conference

Conference	2003 IEEE/LEOS International Conference on Optical MEMS
Country/Territory	United States
City	Waikoloa
Period	18/08/03 → 21/08/03

Keywords

Electrodes
Integrated optics
Micromirrors
Mirrors
Optical device fabrication
Optical devices
Optical films
Piezoelectric actuators
Polarization
Thick films

Access to Document

10.1109/OMEMS.2003.1233465

Cite this

Tsaur, J., Kobayashi, T., Ichiki, M., Maeda, R., & Suga, T. (2003). An integrated fabrication of sol-gel derived PZT thick films and SOI for 2D optical micromirror. In 2003 IEEE/LEOS International Conference on Optical MEMS (pp. 57-58). Article 1233465 (2003 IEEE/LEOS International Conference on Optical MEMS). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OMEMS.2003.1233465

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title = "An integrated fabrication of sol-gel derived PZT thick films and SOI for 2D optical micromirror",

abstract = "This paper aims to improve the sol-gel process and demonstrate the integrated fabrication with the use of SOI wafers. The piezoelectric properties of the PZT and the silicon-based micromirror with a plane structure are also presented.",

keywords = "Electrodes, Integrated optics, Micromirrors, Mirrors, Optical device fabrication, Optical devices, Optical films, Piezoelectric actuators, Polarization, Thick films",

author = "J. Tsaur and T. Kobayashi and M. Ichiki and R. Maeda and T. Suga",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 2003 IEEE/LEOS International Conference on Optical MEMS ; Conference date: 18-08-2003 Through 21-08-2003",

year = "2003",

doi = "10.1109/OMEMS.2003.1233465",

language = "英语",

series = "2003 IEEE/LEOS International Conference on Optical MEMS",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "57--58",

booktitle = "2003 IEEE/LEOS International Conference on Optical MEMS",

}

Tsaur, J, Kobayashi, T, Ichiki, M, Maeda, R & Suga, T 2003, An integrated fabrication of sol-gel derived PZT thick films and SOI for 2D optical micromirror. in 2003 IEEE/LEOS International Conference on Optical MEMS., 1233465, 2003 IEEE/LEOS International Conference on Optical MEMS, Institute of Electrical and Electronics Engineers Inc., pp. 57-58, 2003 IEEE/LEOS International Conference on Optical MEMS, Waikoloa, United States, 18/08/03. https://doi.org/10.1109/OMEMS.2003.1233465

An integrated fabrication of sol-gel derived PZT thick films and SOI for 2D optical micromirror. / Tsaur, J.; Kobayashi, T.; Ichiki, M. et al.
2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc., 2003. p. 57-58 1233465 (2003 IEEE/LEOS International Conference on Optical MEMS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - An integrated fabrication of sol-gel derived PZT thick films and SOI for 2D optical micromirror

AU - Tsaur, J.

AU - Kobayashi, T.

AU - Ichiki, M.

AU - Maeda, R.

AU - Suga, T.

PY - 2003

Y1 - 2003

N2 - This paper aims to improve the sol-gel process and demonstrate the integrated fabrication with the use of SOI wafers. The piezoelectric properties of the PZT and the silicon-based micromirror with a plane structure are also presented.

AB - This paper aims to improve the sol-gel process and demonstrate the integrated fabrication with the use of SOI wafers. The piezoelectric properties of the PZT and the silicon-based micromirror with a plane structure are also presented.

KW - Electrodes

KW - Integrated optics

KW - Micromirrors

KW - Mirrors

KW - Optical device fabrication

KW - Optical devices

KW - Optical films

KW - Piezoelectric actuators

KW - Polarization

KW - Thick films

UR - https://www.scopus.com/pages/publications/84946221875

U2 - 10.1109/OMEMS.2003.1233465

DO - 10.1109/OMEMS.2003.1233465

M3 - 会议稿件

AN - SCOPUS:84946221875

T3 - 2003 IEEE/LEOS International Conference on Optical MEMS

SP - 57

EP - 58

BT - 2003 IEEE/LEOS International Conference on Optical MEMS

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2003 IEEE/LEOS International Conference on Optical MEMS

Y2 - 18 August 2003 through 21 August 2003

ER -

Tsaur J, Kobayashi T, Ichiki M, Maeda R, Suga T. An integrated fabrication of sol-gel derived PZT thick films and SOI for 2D optical micromirror. In 2003 IEEE/LEOS International Conference on Optical MEMS. Institute of Electrical and Electronics Engineers Inc. 2003. p. 57-58. 1233465. (2003 IEEE/LEOS International Conference on Optical MEMS). doi: 10.1109/OMEMS.2003.1233465

An integrated fabrication of sol-gel derived PZT thick films and SOI for 2D optical micromirror

Abstract

Publication series

Conference

Keywords

Access to Document

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