TY - GEN
T1 - An infrared radiation based thermal biosensor for enzymatic biochemical reactions
AU - Zhang, Lei
AU - Dong, Tao
AU - Zhao, Xinyan
AU - Yang, Zhaochu
AU - Pires, Nuno M.M.
PY - 2012
Y1 - 2012
N2 - In this paper, a thermal biosensor based on the infrared radiation energy is proposed for calorimetric measurement of biochemical reactions. Having a good structure design combined with MEMS technology as well as employing the Si /SiGe quantum well sensing material with a high TCR and low 1/f noise, the sensor shows potentials to be high sensitive and real-time. The urea enzymatic reaction was tested to verify the performance of sensor, which demonstrates a linear detection range from 0.5mM to 150mM and a relative standard deviation less than 1%. For the sensor fabrication, wafer-level transfer bonding is a key process, which makes the integration of quantum well material and a free standing structure possible. It reduces the heat loss from the sensor to the surrounding environment.
AB - In this paper, a thermal biosensor based on the infrared radiation energy is proposed for calorimetric measurement of biochemical reactions. Having a good structure design combined with MEMS technology as well as employing the Si /SiGe quantum well sensing material with a high TCR and low 1/f noise, the sensor shows potentials to be high sensitive and real-time. The urea enzymatic reaction was tested to verify the performance of sensor, which demonstrates a linear detection range from 0.5mM to 150mM and a relative standard deviation less than 1%. For the sensor fabrication, wafer-level transfer bonding is a key process, which makes the integration of quantum well material and a free standing structure possible. It reduces the heat loss from the sensor to the surrounding environment.
UR - https://www.scopus.com/pages/publications/84883563412
U2 - 10.1109/EMBC.2012.6345983
DO - 10.1109/EMBC.2012.6345983
M3 - 会议稿件
C2 - 23365944
AN - SCOPUS:84883563412
SN - 9781424441198
T3 - Proceedings of the Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS
SP - 523
EP - 526
BT - 2012 Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC 2012
T2 - 34th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBS 2012
Y2 - 28 August 2012 through 1 September 2012
ER -