An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever

T. Kobayashi; S. Oyama; H. Okada; N. Makimoto; K. Tanaka; T. Itoh; R. Maeda

doi:10.1109/MEMSYS.2012.6170178

An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever

T. Kobayashi
, S. Oyama
, H. Okada
, N. Makimoto
, K. Tanaka
, T. Itoh
, R. Maeda

National Institute of Advanced Industrial Science and Technology
Hirose Electric Co

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

21 Scopus citations

Abstract

We have developed MEMS-based electrostatic field sensors (MEMS-EFS), which integrate a probe to detect electrostatic field and Pb(Zr, Ti)O ₃ (PZT) thin films for sensor and actuator into micro cantilevers. The MEMS-EFS were fabricated through sol-gel deposition of PZT thin films and MEMS microfabrication process. Self-excited vibration of the micro cantilevers has been achieved by amplifying and forwarding the output voltage from the PZT thin films for sensor with a band-pass filter circuit. The developed MEMS-EFS can evaluate an electrostatic field of -3 to 3 kV with good linearity.

Original language	English
Title of host publication	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Pages	527-530
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170178
State	Published - 2012
Externally published	Yes
Event	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 - Paris, France Duration: 29 Jan 2012 → 2 Feb 2012

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012
Country/Territory	France
City	Paris
Period	29/01/12 → 2/02/12

Access to Document

10.1109/MEMSYS.2012.6170178

Cite this

Kobayashi, T., Oyama, S., Okada, H., Makimoto, N., Tanaka, K., Itoh, T., & Maeda, R. (2012). An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 (pp. 527-530). Article 6170178 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2012.6170178

Kobayashi, T. ; Oyama, S. ; Okada, H. et al. / An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever. 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. pp. 527-530 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{00afcbe703254171b9574e6e58f7f615,

title = "An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever",

abstract = "We have developed MEMS-based electrostatic field sensors (MEMS-EFS), which integrate a probe to detect electrostatic field and Pb(Zr, Ti)O 3 (PZT) thin films for sensor and actuator into micro cantilevers. The MEMS-EFS were fabricated through sol-gel deposition of PZT thin films and MEMS microfabrication process. Self-excited vibration of the micro cantilevers has been achieved by amplifying and forwarding the output voltage from the PZT thin films for sensor with a band-pass filter circuit. The developed MEMS-EFS can evaluate an electrostatic field of -3 to 3 kV with good linearity.",

author = "T. Kobayashi and S. Oyama and H. Okada and N. Makimoto and K. Tanaka and T. Itoh and R. Maeda",

year = "2012",

doi = "10.1109/MEMSYS.2012.6170178",

language = "英语",

isbn = "9781467303248",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "527--530",

booktitle = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012",

note = "2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012 ; Conference date: 29-01-2012 Through 02-02-2012",

}

Kobayashi, T, Oyama, S, Okada, H, Makimoto, N, Tanaka, K, Itoh, T & Maeda, R 2012, An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever. in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012., 6170178, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 527-530, 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012, Paris, France, 29/01/12. https://doi.org/10.1109/MEMSYS.2012.6170178

An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever. / Kobayashi, T.; Oyama, S.; Okada, H. et al.
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 527-530 6170178 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever

AU - Kobayashi, T.

AU - Oyama, S.

AU - Okada, H.

AU - Makimoto, N.

AU - Tanaka, K.

AU - Itoh, T.

AU - Maeda, R.

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N2 - We have developed MEMS-based electrostatic field sensors (MEMS-EFS), which integrate a probe to detect electrostatic field and Pb(Zr, Ti)O 3 (PZT) thin films for sensor and actuator into micro cantilevers. The MEMS-EFS were fabricated through sol-gel deposition of PZT thin films and MEMS microfabrication process. Self-excited vibration of the micro cantilevers has been achieved by amplifying and forwarding the output voltage from the PZT thin films for sensor with a band-pass filter circuit. The developed MEMS-EFS can evaluate an electrostatic field of -3 to 3 kV with good linearity.

AB - We have developed MEMS-based electrostatic field sensors (MEMS-EFS), which integrate a probe to detect electrostatic field and Pb(Zr, Ti)O 3 (PZT) thin films for sensor and actuator into micro cantilevers. The MEMS-EFS were fabricated through sol-gel deposition of PZT thin films and MEMS microfabrication process. Self-excited vibration of the micro cantilevers has been achieved by amplifying and forwarding the output voltage from the PZT thin films for sensor with a band-pass filter circuit. The developed MEMS-EFS can evaluate an electrostatic field of -3 to 3 kV with good linearity.

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012

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ER -

Kobayashi T, Oyama S, Okada H, Makimoto N, Tanaka K, Itoh T et al. An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever. In 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems, MEMS 2012. 2012. p. 527-530. 6170178. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2012.6170178

An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantilever

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