An active head slider using a piezoelectric cantilever for in situ flying-height control

Kenji Suzuki; Ryutaro Maeda; Jiaru Chu; Takahisa Kato; Masayuki Kurita

doi:10.1109/TMAG.2003.808934

An active head slider using a piezoelectric cantilever for in situ flying-height control

Kenji Suzuki
, Ryutaro Maeda
, Jiaru Chu
, Takahisa Kato
, Masayuki Kurita

The University of Tokyo
National Institute of Advanced Industrial Science and Technology
University of Science and Technology of China
Hitachi, Ltd.

Research output: Contribution to journal › Article › peer-review

26 Scopus citations

Abstract

This paper describes design and fabrication of active head sliders using PZT thin films for in situ flying-height control. Silicon sliders with piezoelectric unimorph cantilevers were fabricated monolithically using micromachining process. The deflection of 70 nm was obtained at the tip of the 0.6-mm-long cantilever with a drive voltage of 4 V. Furthermore, an air-bearing surface design that makes it possible to reduce the aerodynamic lift force under the head is discussed.

Original language	English
Pages (from-to)	826-831
Number of pages	6
Journal	IEEE Transactions on Magnetics
Volume	39
Issue number	2 I
DOIs	https://doi.org/10.1109/TMAG.2003.808934
State	Published - Mar 2003
Externally published	Yes

Keywords

Hard disks
Microactuators
Microelecto-mechanical devices
Piezoelectric films

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10.1109/TMAG.2003.808934

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@article{0de49e1a8d4d4442acfb27b1caa50891,

title = "An active head slider using a piezoelectric cantilever for in situ flying-height control",

abstract = "This paper describes design and fabrication of active head sliders using PZT thin films for in situ flying-height control. Silicon sliders with piezoelectric unimorph cantilevers were fabricated monolithically using micromachining process. The deflection of 70 nm was obtained at the tip of the 0.6-mm-long cantilever with a drive voltage of 4 V. Furthermore, an air-bearing surface design that makes it possible to reduce the aerodynamic lift force under the head is discussed.",

keywords = "Hard disks, Microactuators, Microelecto-mechanical devices, Piezoelectric films",

author = "Kenji Suzuki and Ryutaro Maeda and Jiaru Chu and Takahisa Kato and Masayuki Kurita",

year = "2003",

month = mar,

doi = "10.1109/TMAG.2003.808934",

language = "英语",

volume = "39",

pages = "826--831",

journal = "IEEE Transactions on Magnetics",

issn = "0018-9464",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

number = "2 I",

}

TY - JOUR

T1 - An active head slider using a piezoelectric cantilever for in situ flying-height control

AU - Suzuki, Kenji

AU - Maeda, Ryutaro

AU - Chu, Jiaru

AU - Kato, Takahisa

AU - Kurita, Masayuki

PY - 2003/3

Y1 - 2003/3

N2 - This paper describes design and fabrication of active head sliders using PZT thin films for in situ flying-height control. Silicon sliders with piezoelectric unimorph cantilevers were fabricated monolithically using micromachining process. The deflection of 70 nm was obtained at the tip of the 0.6-mm-long cantilever with a drive voltage of 4 V. Furthermore, an air-bearing surface design that makes it possible to reduce the aerodynamic lift force under the head is discussed.

AB - This paper describes design and fabrication of active head sliders using PZT thin films for in situ flying-height control. Silicon sliders with piezoelectric unimorph cantilevers were fabricated monolithically using micromachining process. The deflection of 70 nm was obtained at the tip of the 0.6-mm-long cantilever with a drive voltage of 4 V. Furthermore, an air-bearing surface design that makes it possible to reduce the aerodynamic lift force under the head is discussed.

KW - Hard disks

KW - Microactuators

KW - Microelecto-mechanical devices

KW - Piezoelectric films

UR - https://www.scopus.com/pages/publications/0037361414

U2 - 10.1109/TMAG.2003.808934

DO - 10.1109/TMAG.2003.808934

M3 - 文章

AN - SCOPUS:0037361414

SN - 0018-9464

VL - 39

SP - 826

EP - 831

JO - IEEE Transactions on Magnetics

JF - IEEE Transactions on Magnetics

IS - 2 I

ER -

An active head slider using a piezoelectric cantilever for in situ flying-height control

Abstract

Keywords

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