Amplitude deflection in a nonlinear MEMS resonator under parametric excitation

In this paper, the dynamic characteristics of a parametrically excited MEMS micro-resonator incorporating high-order nonlinearity and nonlinear damping are investigated experimentally and theoretically. An intriguing phenomenon of amplitude deflection is observed when the parametric excitation strength exceeds a certain value. We establish a dynamic model of the micro-resonator under parametric excitation and employ the averaging method to obtain an approximate analytical solution. Then the theoretical study is made to explain the amplitude deflection under large excitation, attributing it to the combined effects of high-order nonlinearity and nonlinear damping. These findings contribute to a more comprehensive understanding of the characteristics of parametrically excited systems.