Amendment of AFM linewidth measurement by the effective parameters of tip in situ

The effective parameters of atomic force microscope (AFM) tip in situ are defined and characterized and the amendment model of AFM linewidth measurement by the effective parameters of tip in situ is offered for the accurate linewidth and profile measurement. The effective radius and the half internal angle are used to characterize the composite shape of AFM tip, and the cantilever axis slope angle is used as the characteristic parameter of the installing status of AFM tip. The effective parameters are obtained through the comparative measurement between AFM and scanning electron microscope (SEM) on two specially designed characterizers with straps having different trapezoidal profiles. The different amendment expressions that can be executed for different slope angles of AFM scanning profiles are offered. The amendment expressions and the effective parameters have been utilized to amend the result of the AFM linewidth measurement on a microelectronic mask.