Advances of PZT ferroelectric thin films in etching techniques

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1 Scopus citations

Original language	English
Pages (from-to)	386
Number of pages	1
Journal	Yadian Yu Shengguang/Piezoelectrics and Acoustooptics
Volume	25
Issue number	5
State	Published - Oct 2003

Cite this

@article{f1c76fe61ae840a291300852fc9b1a2a,

title = "Advances of PZT ferroelectric thin films in etching techniques",

author = "Peng Shi and Xi Yao and Wu, \{Xiao Qing\} and Zhang, \{Liang Ying\}",

year = "2003",

month = oct,

language = "英语",

volume = "25",

pages = "386",

journal = "Yadian Yu Shengguang/Piezoelectrics and Acoustooptics",

issn = "1004-2474",

publisher = "Sichuan Institute of Piezoelectric and Acoustooptic Technology",

number = "5",

}

TY - JOUR

T1 - Advances of PZT ferroelectric thin films in etching techniques

AU - Shi, Peng

AU - Yao, Xi

AU - Wu, Xiao Qing

AU - Zhang, Liang Ying

PY - 2003/10

Y1 - 2003/10

UR - https://www.scopus.com/pages/publications/0345448366

M3 - 文章

AN - SCOPUS:0345448366

SN - 1004-2474

VL - 25

SP - 386

JO - Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

JF - Yadian Yu Shengguang/Piezoelectrics and Acoustooptics

IS - 5

ER -