Adjusting light distribution for generating microlens arrays with a controllable profile and fill factor

Lanlan Wang; Weitao Jiang; Hongzhong Liu; Zhongbo Yang; Yongsheng Shi; Lei Yin; Xin Li; Yucheng Ding; Ningli An

doi:10.1088/0960-1317/24/12/125012

Adjusting light distribution for generating microlens arrays with a controllable profile and fill factor

Lanlan Wang
, Weitao Jiang
, Hongzhong Liu
, Zhongbo Yang
, Yongsheng Shi
, Lei Yin
, Xin Li
, Yucheng Ding
, Ningli An

School of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

This paper presents a simple but effective process to fabricate high quality aspheric microlens arrays (MLA) and bifocal microlens arrays (BMLA) by predicting and adjusting the UV light distribution. The profile-controllable BMLA has two different focal lengths simultaneous along the optical axis, measured at f₁ = 26 ± 1 μm (the top lens) and f₂ = 35 ± 1 μm (the base lens), respectively. The fill-factor and curvature of the obtained profiles have been well optimized by controlling the air gap and exposure time, for instance, the fill factor is topped up to 99.7% from an initial 25.8% (the corresponding aperture diameter is enlarged to 15 μm from an initial 10 μm) and the micro lens height ranges from 2.66 μm to 9.03 μm. Optical tests indicate that MLAs and BMLAs have a uniform shape and a good consistency of the focal length. By adjusting the light distribution, this proposed strategy possesses the ability and flexibility to fabricate profile-controllable MLAs and BMLAs.

Original language	English
Article number	125012
Journal	Journal of Micromechanics and Microengineering
Volume	24
Issue number	12
DOIs	https://doi.org/10.1088/0960-1317/24/12/125012
State	Published - 1 Dec 2014

Keywords

42.79.Bh lenses
lithography
pattern transfer 42.25.Fx diffraction and scattering
prisms and mirrors 42.82.Cr fabrication techniques

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10.1088/0960-1317/24/12/125012

Cite this

@article{89f3e5014c224d50986a30743b9c45ae,

title = "Adjusting light distribution for generating microlens arrays with a controllable profile and fill factor",

abstract = "This paper presents a simple but effective process to fabricate high quality aspheric microlens arrays (MLA) and bifocal microlens arrays (BMLA) by predicting and adjusting the UV light distribution. The profile-controllable BMLA has two different focal lengths simultaneous along the optical axis, measured at f1 = 26 ± 1 μm (the top lens) and f2 = 35 ± 1 μm (the base lens), respectively. The fill-factor and curvature of the obtained profiles have been well optimized by controlling the air gap and exposure time, for instance, the fill factor is topped up to 99.7\% from an initial 25.8\% (the corresponding aperture diameter is enlarged to 15 μm from an initial 10 μm) and the micro lens height ranges from 2.66 μm to 9.03 μm. Optical tests indicate that MLAs and BMLAs have a uniform shape and a good consistency of the focal length. By adjusting the light distribution, this proposed strategy possesses the ability and flexibility to fabricate profile-controllable MLAs and BMLAs.",

keywords = "42.79.Bh lenses, lithography, pattern transfer 42.25.Fx diffraction and scattering, prisms and mirrors 42.82.Cr fabrication techniques",

author = "Lanlan Wang and Weitao Jiang and Hongzhong Liu and Zhongbo Yang and Yongsheng Shi and Lei Yin and Xin Li and Yucheng Ding and Ningli An",

note = "Publisher Copyright: {\textcopyright} 2014 IOP Publishing Ltd.",

year = "2014",

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doi = "10.1088/0960-1317/24/12/125012",

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T1 - Adjusting light distribution for generating microlens arrays with a controllable profile and fill factor

AU - Wang, Lanlan

AU - Jiang, Weitao

AU - Liu, Hongzhong

AU - Yang, Zhongbo

AU - Shi, Yongsheng

AU - Yin, Lei

AU - Li, Xin

AU - Ding, Yucheng

AU - An, Ningli

PY - 2014/12/1

Y1 - 2014/12/1

N2 - This paper presents a simple but effective process to fabricate high quality aspheric microlens arrays (MLA) and bifocal microlens arrays (BMLA) by predicting and adjusting the UV light distribution. The profile-controllable BMLA has two different focal lengths simultaneous along the optical axis, measured at f1 = 26 ± 1 μm (the top lens) and f2 = 35 ± 1 μm (the base lens), respectively. The fill-factor and curvature of the obtained profiles have been well optimized by controlling the air gap and exposure time, for instance, the fill factor is topped up to 99.7% from an initial 25.8% (the corresponding aperture diameter is enlarged to 15 μm from an initial 10 μm) and the micro lens height ranges from 2.66 μm to 9.03 μm. Optical tests indicate that MLAs and BMLAs have a uniform shape and a good consistency of the focal length. By adjusting the light distribution, this proposed strategy possesses the ability and flexibility to fabricate profile-controllable MLAs and BMLAs.

AB - This paper presents a simple but effective process to fabricate high quality aspheric microlens arrays (MLA) and bifocal microlens arrays (BMLA) by predicting and adjusting the UV light distribution. The profile-controllable BMLA has two different focal lengths simultaneous along the optical axis, measured at f1 = 26 ± 1 μm (the top lens) and f2 = 35 ± 1 μm (the base lens), respectively. The fill-factor and curvature of the obtained profiles have been well optimized by controlling the air gap and exposure time, for instance, the fill factor is topped up to 99.7% from an initial 25.8% (the corresponding aperture diameter is enlarged to 15 μm from an initial 10 μm) and the micro lens height ranges from 2.66 μm to 9.03 μm. Optical tests indicate that MLAs and BMLAs have a uniform shape and a good consistency of the focal length. By adjusting the light distribution, this proposed strategy possesses the ability and flexibility to fabricate profile-controllable MLAs and BMLAs.

KW - 42.79.Bh lenses

KW - lithography

KW - pattern transfer 42.25.Fx diffraction and scattering

KW - prisms and mirrors 42.82.Cr fabrication techniques

UR - https://www.scopus.com/pages/publications/84914672911

U2 - 10.1088/0960-1317/24/12/125012

DO - 10.1088/0960-1317/24/12/125012

M3 - 文章

AN - SCOPUS:84914672911

SN - 0960-1317

VL - 24

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 12

M1 - 125012

ER -

Adjusting light distribution for generating microlens arrays with a controllable profile and fill factor

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